Used KURT J. LESKER Torus 101 #53523 for sale
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ID: 53523
Magnetron round sputtering source
With ground shields & feedthrus
Diameter: 6 3/8"
Aluminum target.
KURT J. LESKER Torus 101 is a magnetron sputtering equipment designed for thin-film deposition applications. The system operates in two modes, DC or RF, for enhanced coating uniformity and adhesion. The DC mode is ideal for use when the uniformity of the sputtered layer is not critical, while the RF mode is ideal for high-density, highly uniform layers of material. The unit features a variable gas flow control, pressure control, and a central processing unit for precise control over deposition rates, film thickness, and other parameters. Torus 101 utilizes an annularly shaped magnetron source that produces high-energy ions to sputter the target material. This design allows for an extremely uniform film deposition over the entire area of a substrate. The thickness of the deposition can be varied while retaining a uniform film quality in the RF mode. A vacuum machine is integrated into the sputtering tool to remove any gases or particles generated during the process. The asset includes a temperature sensor and quarter-wave matching network to precisely control the ion energy. The advanced power supply design enables both high and low power operation. Moreover, a turbo-molecular pump model is integrated into the equipment to achieve the desired substrate temperature and to maintain optimum boresight stability during deposition. In addition, the advanced KURT J. LESKER Torus 101 sputtering system features embedded diagnostics that allow the user to evaluate the unit performance. The diagnostics provide information regarding the status of the magnetron, vacuum machine, temperature, gas flow, and other parameters. To further enhance precision, users can choose from a variety of sophisticated recipes for optimal thin-film deposition. Torus 101 sputtering tool is an ideal solution for fast and uniform thin-film deposition as well as for plasma etching and oxidation applications. The asset is designed to meet the needs of any mid-sized laboratory and allow for reliable and repeatable results. Its versatility and precision make it suitable for industrial and research applications in a wide range of fields, such as microelectronics, optics, and aerospace engineering.
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