Used LEYBOLD / BALZERS ZH 620 #293818706 for sale

ID: 293818706
Wafer Size: 8”
Vintage: 1995
Sputter deposition system, 8” 1995 vintage.
LEYBOLD / BALZERS ZH 620 is a highly advanced, cost effective, and reliable sputtering equipment used in various industries. It has been designed to deliver superior sputtering performance and superior process control. It includes a highly advanced and efficient sputtering source- LEYBOLD ZH 620 ion source. This ion source is comprised of two powerful and adjustable magnets which create a sputtering field to be adjusted according to process requirements. This allows for optimal sputtering performance in various industrial applications. BALZERS ZH 620 is also equipped with advanced mechanics and control systems which optimize the part-to-part consistency and flexibility of the system. The unit comes equipped with fully automated and programmable motion and controls which allow precise control over the deposition process. The machine also features a high-current metal vapor source which can be used for deposition and etching procedures. ZH 620 has a sputtering chamber which measures 455 x 460 x 425 mm with an inner volume of 85 liters. The chamber is equipped with a large flapper valve which is powered by a large compressor for a uniform gas flow. The chamber also features a high-pressure locking door for improved safety and security. Moreover, LEYBOLD / BALZERS ZH 620 has a temperature controlled environment to ensure temperature consistency and prevent contamination. The tool is equipped with a 10-segment RF power supply which is able to deliver up to 32 kW of power for sputtering. The power supply also offers a variety of bias and dwell settings to optimize process repeatability and control. LEYBOLD ZH 620 is the perfect sputtering asset for a variety of applications. It is easy to use and offers cost effective operation due to its efficient working design. The advanced features and reliable source of power make BALZERS ZH 620 an ideal choice for sputtering applications.
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