Used LEYBOLD / BALZERS ZH 620 #9100807 for sale
URL successfully copied!
Tap to zoom
ID: 9100807
Wafer Size: 4"-6"
Vintage: 1993
Sputter deposition system, 4"-6"
(3) Targets, 8"
Sputter etcher
(3) Sputter guns
PC Controller
HUTTINGER RF Supply 13.56 MHz
INFICON QUADREX 100 Residual gas analyzer
Substrate heat
Onboard CTI-8 on process chamber
Turbo pump on loadlock chamber
Cluster type
1993 vintage.
LEYBOLD / BALZERS ZH 620 is a high-performance sputtering equipment designed for use in various applications, such as research, industrial, and nano-lithography. It combines the best in modern technology with comprehensive usability for superior results. The sputtering system has a high-resistance graphite target with an arc-firing circuit which allows for adjustable ion current and power levels. LEYBOLD ZH 620 is capable of thermal and pulsed mode sputtering, making it suitable for different applications. The high-resistance graphite target can be quickly and easily changed and the target to substrate distance can be adjusted quickly for improved results. The sputtering unit has a small form factor which makes it easy to install in even the smallest of spaces. The low power consumption makes it an economical choice for many applications. It is designed with a large 8.4" LCD touchscreen display which is easy to navigate through. The user interface includes a comprehensive source-and-substrate settings adjustment, chamber setup, power machine parameters, and diagnostics. It also offers a range of programmable features, such as substrate temperature, pressure control, high voltage control, and end-point monitoring. BALZERS ZH 620 can sputter a range of materials, including metals, insulators, ceramic, polymers, and organic materials. The tool is designed to sputter between 0.1 and 0.2 mm thick films. The sputter deposition rate can be adjusted from 0.001 to 0.2 nm/min depending on the substrate material, target material, and chamber temperature. ZH 620 can be equipped with a range of additional components, such as a special plasma source, sputter stripper, and temperature controlled stainless steel baffle for improved results. It also offers integration with third-party devices, such as X-ray fluorescence spectrometers, QCM-based mass spectrometers, and Langmuir probes. All in all, LEYBOLD / BALZERS ZH 620 is an advanced sputtering asset designed for a range of applications. Its features and accessories make it a versatile, cost-effective choice for many users.
There are no reviews yet