Used LEYBOLD Helios 2100 #293601797 for sale

LEYBOLD Helios 2100 is a dual magnetron sputtering equipment designed for coating large-area substrates. This system features two independent magnetron sources and provides greater process flexibility and higher throughput than single-source, dual-target systems. It also allows for a wide range of materials and applications, including semiconductor, optics, displays, and packaging. Helios 2100 uses a dual-magnetron source with a 0.5-4.0 kW power supply for precision film deposition. The integrated DC magnetron sputter sources have built-in process control for uniformity and repeatability, and the unit includes an integrated wafer temperature monitoring machine. The sources can be moved up and down to accommodate up to three substrate sizes and feature an adjustable vertical gap between substrates. The tool also features an on-board process controller, auto operation, a 10-point wafer mapping asset, and a recipe and parameter-saving feature. LEYBOLD Helios 2100 has a robust design that allows for easy maintenance and cleaning. The enclosure has been designed to reduce contamination and down-time. The model also offers a variety of options to increase its sputter-coating capabilities, such as the DC plasma source, RF power, reactive sputtering, and multilevel sputtering. The integrated pulsed DC, hollow cathode, and 'twin target' magnetron sputtering sources provide superior film uniformity and increased deposition rates. Helios 2100 offers a range of process control and protection features, such as power control, water cooling, and DC power conditioning. Its soft start equipment allows for seamless integration with plant automation systems, and its comprehensive software package makes it easy to monitor the process from a PC. The system also includes safety features, such as automatic shutoff when operating conditions exceed pre-set limits. In conclusion, LEYBOLD Helios 2100 is a powerful and reliable sputtering unit for large-area substrates. It offers superior film uniformity and repeatability, plus a wide range of process and protection features to ensure safe and efficient operation.