Used LEYBOLD Helios 400 #293590262 for sale
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ID: 293590262
Wafer Size: 4"
Sputtering system, 4"
OMS 5000
Hydrogen
PBS Plasma source: (2) Gases (Oxygen and Argon)
Load lock
(2) Vacuums
Power control
(1) Chamber
Control panel
Targets:
(4) Silicon
(2) NiCr
(2) NbTa
(2) TiTaAI
Turbo pumps:
TPH 1501 UP
TC100
8-Position for 4" deposition
3D Glass tube deposition
Manuals included.
LEYBOLD Helios 400 is a high-performance sputtering equipment, designed for industrial and research applications. It provides a high degree of process control and accuracy for sputtering thin films onto a wide range of substrates. Helios 400 has a modular design, allowing it to be configured to meet specific application requirements. The system features a high-vacuum stainless steel chamber with a base pressure of better than 2×10-6 mbar. The flexible chamber configuration can accommodate up to four sputter sources, with a range of sizes available. Sources can be positioned independently, allowing for large and complex thin-film deposition areas. The unit also has an integrated substrate handling machine, allowing for efficient and accurate sample positioning. LEYBOLD Helios 400 features LEYBOLD advanced sputter control tool, providing precise process control and repeatable sputter rates. The asset is also compatible with process monitoring, allowing for continuous process optimization. The model is vacuum-compatible and can be integrated with a range of process gases and pumping systems. A range of controller options is available, offering access to multiple control functions and a range of data outputs for process monitoring. The equipment is also compatible with a range of external magnetrons, allowing for deposition of materials with high magnetic properties. In addition to its sputtering applications, Helios 400 can also be used for a variety of other tasks, such as etching, formation of bi-layers, and deposition of high-reflection and protective coatings. This flexibility and control make LEYBOLD Helios 400 ideal for the production of high-quality and reliable thin films.
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