Used LEYBOLD HERAEUS Z550 #9237887 for sale
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ID: 9237887
Sputtering system
With load-lock
MAGNETRON PK150: 5-Positions
Sputter down
Metal and precious metal
(4) Cathodes
Heating station.
LEYBOLD HERAEUS Z550 sputtering equipment is a high-precision etching tool designed for the fabrication of films with uniform thickness on different surfaces. It provides superior surface accuracy and is capable of achieving extremely high precision levels of film thickness to make a wide variety of thin film systems, such as, MEMS, solar cells, semiconductor devices, capacitors, and optoelectronic devices. LEYBOLD HERAEUS Z 550 utilizes the unique LEYBOLD HERAEUS OpenArc dome sputtering head, which provides a uniform and consistent process over the entire surface area. This system offers a variable process pressure capability, allowing up to 10-4 mbar process pressure with an adjustable gas flow and a highly efficient secondary ionization source. It is capable of producing various film forms like polycrystalline, amorphous, and nanocrystalline. HERAEUS Z550 is further enhanced by its capability to monitor and adjust the process parameters with an advanced optical pyrometer. This feature provides automatic temperature control to ensure uniform and accurate deposition and conformal film processes. Allen Bradley automation allows users to quickly program the unit for various processes and the Windows-based software allows for easy setup of components, including target apertures, dome rotation, gas flow and pressure. Z550 is also designed with a built-in overpressure machine for additional safety. The tool is powered by a low-voltage DC magnetron with HV power supply for high rate deposition. The asset also includes load lock chambers, robotic wafer handling systems, temperature sensors, and high-pressure valves for additional safety. LEYBOLD HERAEUS HERAEUS Z550 is designed for low contamination production environments and is also outfitted with HEPA filtered cleaning model. Z 550 sputtering equipment is a powerful and versatile tool for modern high-precision film fabrication. This system is ideal for demanding application in the electronics, medical, optoelectronics, nanotechnology, and aerospace industries. Utilizing cutting-edge technology, LEYBOLD HERAEUS Z550 is designed to provide reliable and accurate film deposition for a wide range of applications.
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