Used LEYBOLD HERAEUS Z550S #9192875 for sale
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ID: 9192875
Sputtering system
With load-lock
(5) Cathode positions
(4) Cathodes PK150
Heater
RF & DC Sputtering.
LEYBOLD HERAEUS Z550S is a sputtering equipment designed to perform physical vapor deposition (PVD) using a wide range of sputtering targets. It uses a cathodic arc deposition (arc PVD) to deposit thin films of high purity metallic and non-metallic materials with varying thickness. It can also be used to fabricate single layer and multi-layer coatings. Z550S sputtering system is designed for use in advanced research and industrial applications such as semiconductor-grade displays and optical coatings. LEYBOLD HERAEUS Z550S features a four target turret with an adjustable angle in order to facilitate film alignment and layer conformance. The sputter chamber is 6" (152 mm) in diameter and 18" (457 mm) in length, which gives it a large chamber volume for sputtering larger area substrates. Z550S can accommodate substrates up to 8" (203 mm) in diameter and up to 4″ (102 mm) thick. An integrated cooling jacket helps to minimize target and substrate heating. LEYBOLD HERAEUS Z550S sputtering unit features a high-performance electron cyclotron resonance (ECR) ion source. This ion source provides a significantly more uniform and homogeneous ion bombardment across the targets and substrates than conventional RF ion sources (RF-PVD). The ECR ion source has excellent deposition rate uniformity over large substrate areas and is suitable for all kinds of special targets such as non-conductive materials and slow eroding targets. Z550S sputtering machine is equipped with advanced process control software that enables users to easily program deposition procedures and monitor deposition parameters. The software also allows users to create process database, which can store and load parameters for traditional and complex coating processes. The user can monitor and control the substrate temperature through LEYBOLD HERAEUS Z550S's computer interface. Z550S sputtering tool is designed for easy maintenance and its components are made from high-quality materials for maximum durability and reliability. Its software can be easily updated via a flash drive and the asset also features a remote diagnostic and troubleshooting service to minimize downtime. As a result, LEYBOLD HERAEUS Z550S is a reliable, affordable, and easy-to-use sputtering model for research and industrial applications.
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