Used LEYBOLD HERAEUS Z650 #32461 for sale
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ID: 32461
Wafer Size: 8"
Vintage: 1990
Inline sputtering system with loadlock, 2 chambers with 3 diode targets per chamber, 8", Plasma Source: RF-power supply Hüttinger TIS0.5/13560
1990 vintage.
LEYBOLD HERAEUS Z650 is a high-end multi-source sputter coater designed for the deposition of thin layers of materials onto various substrate surfaces. It is used in a wide range of applications such as medical device medical diagnostic components, flat panel displays, semiconductor packaging and photovoltaic materials. LEYBOLD HERAEUS Z 650 sputter equipment is composed of two main parts - a power supply and a sputter unit. The power supply includes three separate channels and can handle up to five independent sputter sources. It is equipped with a digital display for monitoring the voltage, current and power levels of each source. Current is monitored at 259 positons along the sputter arc to guarantee optimal sputtering process. The sputter unit consists of a rotatable chuck, which can be used for both shadowless sputter deposition and normal sputtering onto a substrate. The sputter target is held in a floating target holder with a variable tilt angle of up to 10 degrees. This holder can be moved in X and Y directions to ensure uniform coverage of the entire sputter target. The sputter chamber can be operated in various background pressure conditions ranging from 1 mbar to 13 mbar. Z650 system benefits from multiple source capabilities and a wide choice of targets. It is capable of coating a variety of metals, semiconductors and their derivatives, such as aluminum, copper, molybdenum, tungsten and chromium. The modular design allows for several sputtering configurations to be configured simultaneously, providing users with different benefits, such as higher productivity and increased process versatility. Z 650 sputter unit features advanced controls for accurate and repeatable process results. The integrated Data Logger provides real-time process information, which can be transferred and stored on a USB drive for further data analysis. The machine also includes an optional VacPit all-in-one vacuum pump with an oil-free backing. LEYBOLD HERAEUS Z650 sputter tool offers advanced features and precise control for the deposition of thin layers onto various substrate surfaces. The modular design provides flexibility in terms of usage, and improved productivity is achieved with the multiple source capabilities. The Data Logger provides real-time data and is complemented by the integrated VacPit vacuum pump for a cleaner environment.
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