Used LEYBOLD OPTICS Pegasus #9299848 for sale
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ID: 9299848
Vintage: 2015
PVD Sputtering system
(2) MAGNETRON Cathodes for DC and MF Sputter
Ion source: Gpi PPALS 203
(2) Dis 2000V Chambers
(2) HUTTINGER Truplasma DC3050 Electronics
ADVANCED ENERGY Pinnacle Power supply
(6) SHIMADZU EI-D 303M Pump controllers
(2) AOL GSM 300 / 500 Power supplies
RGA analyzers
Spare parts
Cables
Platform
2015 vintage.
LEYBOLD OPTICS Pegasus is a powerful, state-of-the-art sputter deposition equipment designed to produce high-quality thin film coatings. It is built on tried and proven Leybold vacuum technology and comprises a turbomolecular pump with a backing pump, a GD2004/QD digital controller, a well-engineered load lock and two different magnetron sputter sources. Moreover, the system features precise and reliable substrate positioning and load-lock temperature control, as well as an in-situ source temperature and stage parameter optimization. This allows for minimum energy input and yield optimization. The main reactor of the unit is equipped with a stainless steel chamber shield. It is designed to provide maximum protection to personnel, components and coatings. The entire chamber also contains fast-opening and re-closing safety doors for added protection. The Leybold Pegasus uses a Dual Magnetron source operating at both DC and pulsed power levels, as well as an ECRN ion source for high-density ion bombardment. It operates at a pressure of up to 6E-2 Torr with a source-to-substrate distance of up to 60mm, and an up to 16-inch chamber opening. Furthermore, the substrate size can range from 2 to 15 inches, with a sputter power of up to 3 kW. The machine functions with a manually operated sample holder, and allows for the deposition of conductive and non-conductive materials, such as metals, dielectrics, oxides, polymers, and alloys. It also has a built-in substrate cooling tool for temperature control during deposition, and is capable of deposition rates up to 8 µm/min. Moreover, the Leybold LEYBOLD OPTICS Pegasus includes a user-friendly graphical user interface, a process monitoring asset, and a temperature monitor ensuring exact coating thickness control. All these features contribute to precise and repeatable results, making it the ideal tool for many industrial applications such as flat panel display development, optical films deposition, tribological coatings, and medical components & instruments fabrication.
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