Used MEIVAC / ALCATEL / COMPTECH 2460 #9174887 for sale

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ID: 9174887
Wafer Size: 6"
Vintage: 1994
RF Sputtering system, 6" Process chamber ultimate vacuum: ≤2.0E^-6T Process gas pressure range: 0-50mt Process gas flow: 1-200sccm RF: Up: 0-2 kW Down: 0-5 kW Power: 208V, 60 Hz, 3 Phase, 125A 1994 vintage.
MEIVAC / ALCATEL / COMPTECH 2460 is an advanced sputter deposition equipment designed for coating applications in the research and development, semiconductor, and optics industries. The system utilizes multi-target, multi-arc magnetron sputtering for forming protective layers on substrates. This process provides superior performance with respect to uniformity, deposited thickness, and adhesion. The unit comes with up to eight sputtering sources, and a four-axes, automated positioning machine enabling uniform and full coverage. The total deposition area can easily be altered to suit the needs of the application. The features allow for coating radially and/or and laterally. The tool's source control module includes a process monitoring asset that provides comprehensive, real-time deposition information. This includes deposition rate, surface uniformity, contamination, and step height. Other features include high-temperature processing, oxygen plasma-assisted deposition, dielectric layer deposition, and incorporation of unique materials like nano-particles. MEIVAC 2460 is simple to use and includes intuitive set up options, easy to program profile building, and comprehensive support. The model requires minimal space and offers flexible networking options, allowing users to connect and control the unit from multiple locations. ALCATEL 2460 is designed to be highly reliable and is equipped with numerous hardening features. This includes a failsafe power control equipment, monitored voltage, and easily adjustable pulse power supply unloading. Additionally, the unit is designed for safe and cost-effective operation, including comprehensive process surveillance and regulation systems. Designed with the user in mind, 2460 is an advanced and highly efficient sputter deposition system. The unit's superior performance and versatility makes it ideal for a variety of industries and applications. This machine provides users with an easily controllable unit that delivers precise results and exceptional stability.
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