Used MRC 603 #293666830 for sale
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MRC 603 is a versatile and reliable sputtering equipment designed and manufactured by Nova Instruments, Inc. for thin-film deposition processes. The system features a circular, 9-bin, four-arm turret that provides an optimal deposition geometry and a wide range of process flexibility. The turret incorporates a charge card that can control up to six different processes or materials. 603 utilizes a fully automated process control, with a touch-screen PLC, independent DC powersupplies and process-containment features. This ensures that the depositions are repeatable and safe. The unit is also designed to accommodate both DC and RF sputtering configurations, allowing users to customize the machine to their exact process needs. The tool's control station can store up to 20 different recipes for process monitoring. MRC 603 has a built-in gas-handling manifold, allowing the asset to be easily integrated into existing vacuum infrastructure. With a maximum gas flow of 2.5 L/min, this model allows for efficient delivery of gases to the process chamber. In addition, the equipment's open-design HF/DC generator allows for superior etch uniformity, while the dual-magnetron design provides an ideal sputtering environment. Additional features of 603 include a 91-inch chamber that is designed to provide sufficient process area and high throughput. The use of a 6-inch Teflon window enables the system to sputter process materials such as indium, tungsten, molybdenum, aluminum, stainless steel, and alloys. The Teflon window also offers superior optical clarity for optical applications like thin-film photovoltaics. Overall, MRC 603 is a high-quality sputtering unit with all the features needed to support laboratory-level thin-film deposition processes. The machine is efficient, reliable, and cost-effective, and coupled with its advanced features, makes it suitable for large industrial applications as well.
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