Used MRC 603 #9161023 for sale
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MRC 603 is a state-of-the-art sputtering equipment used for thin film deposition. This system utilizes magnetically-enhanced reactive sputter deposition (MARS) to deposit thin films with excellent homogeneity and superior electrical and optical properties. 603 is equipped with a 3-D positionable substrate holder for precise positioning of up to 5 types of substrates. This advanced substrate holder combined with the axial magnetron provides homogenous film growth during each sputtering process. The sputtering source also has computer-controlled power levels that can be adjusted for various process conditions, such as deposition rate, composition, or stress. MRC 603 has a closed-loop gas flow unit that utilizes a pulsed mass flow controller and multiple gas lines for gas mixing. This enables precise control of the gas composition and purity and also allows for rapid cycling of different process gases. The gas flow machine is also equipped with an RTG (real-time gas monitoring) tool that monitors the gas composition in the sputter chamber at any given time. 603 also features a number of safety features that are designed to protect the user and the asset. This includes an emergency stop button, an over-pressure indicator, an anti-corona model, and built-in gas leak detection and purging systems. In addition, MRC 603 has a wide-angle viewing port that allows the user to observe the process from outside the sputter chamber. This provides a convenient way to monitor the deposition process without having to open the door to the chamber. 603 is also equipped with a remote-controlled user interface that enables the user to set up and run the equipment from a remote location. This greatly improves the user experience and enables users to keep track of the deposition process at all times. Overall, MRC 603 is an advanced sputtering system that offers a wide range of capabilities for depositing thin films of excellent homogeneity and superior electrical and optical properties. With its numerous safety features, precise gas mixing, and remote-controlled user interface, 603 is the ideal sputter unit for a wide range of thin film deposition applications.
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