Used MRC 662 #9248464 for sale

MRC 662 is a state-of-the-art, high-performance sputtering equipment from Speion Technologies. It is designed to provide automated, precise, and efficient sputtering of a range of metals and dielectric materials onto large substrates. It features a modular design that enables high versatility in materials, processes, and configurations. The workpiece chamber of 662 has a diameter of 400 mm and a height of 200 mm. It is equipped with two electrostatic chucks, operated by a 20 MHz generator, to hold the workpiece during sputtering. The chamber can withstand vacuum loads up to 5.33x10^-7 Torr and process temperatures ranging from 150 to 420° C. The turntable design of the workpiece chamber allows for uniform motion while electrodes move in three axes for accurate sputtering deposition. MRC 662 offers a variety of sputtering processes including magnetron sputtering, direct current and radio frequency sputtering, and differential sputtering. For maximum precision and repeatability, the sputtering system features digital thickness controllers and process monitoring capability. It also enables users to program up to 8 sputtering operations to be performed in one cycle. The integrated unit also features a programmable gas delivery machine that monitors and controls sputter gas flows during the sputtering process. An automated, radio frequency powered media de-trapping and substrate cleaning tool is also included. In addition, 662 offers a host of safety features including front and back interlocks, an emergency stop button, and a fire alarm asset. The sputtering model integrates RF shielding to eliminate interference with nearby electronics. Overall, MRC 662 sputtering equipment from Speion Technologies is the perfect tool for achieving uniform, repeatable, and precise films of metals and dielectrics on large area substrates. The versatile, automated system is designed with safety features and convenience in mind, making it the ideal choice for any high-precision sputtering needs.