Used MRC 8620 #293638700 for sale

MRC 8620 is a comprehensive and robust sputtering tool built for high throughput applications. This multipurpose equipment includes several sputtering sources and is capable of producing high quality films on both large and small substrates. The system features a full suite of plasma process energy as well as hardware and software components designed to maximize productivity and process repeatability. 8620 is a fully automated sputtering unit comprised of a low profile, modular sputtering chamber, generous load lock area and choice of up to four independently operated DC or RF sputter sources. Each source can accommodate both rectangular and circular magnetrons for a total of up to eight magnets. The ferromagnetic substrates can be patterned with a variety of materials - including metals, ceramics, polymers, and insulators - using optics-based sputtering, thermal evaporation, or multi-target sputtering. The chamber includes an in-situ wiping machine to effectively transfer films from target-to-target during multiple-target sputtering operations. The advanced tool controller provides control over all sputtering parameters, including temperature, pressure, pump speed, gas flow, bias voltage, sputter voltage, and more. In addition to real-time process monitoring and control via a graphic interface, the asset is equipped with multiple protection features, allowing operators to routinely set desired deposition parameters without compromising the uniformity of the film or damaging the substrates. MRC 8620's large wafer load lock chamber is capable of accommodating up to eight 6"/8" substrates or up to four 8"/12" substrates for simultaneous loading/unloading. The model is also outfitted with an in-chamber rotation stage, allowing for uniform processing over the entire planar surface. Overall, 8620's versatile sputtering platform provides users the flexibility to cover a wide range of applications, from thin film solar cells to touch-screens and MEMS devices. Combined with its reliable and efficient design, this equipment can be a valuable asset to any productivity-focused laboratory.