Used MRC 902 #9254520 for sale

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Manufacturer
MRC
Model
902
ID: 9254520
Sputtering system (2) Targets clamp-on DC magnetron Pallet, 12" for wafer load / Unload RF Plasma etch Water cooled CTI-CRYOGENICS 10 Cryo pump.
MRC 902 is a type of sputtering system commonly used in physical vapor deposition (PVD) processes. It is a high-purity, single- or double-ended, cold wall, diode sputtering system with two 6 inch or 8 inch magnetrons. It utilizes a high energy electron beam as the ion source, allowing it to achieve higher deposition rates and better conformality than other sputtering systems. 902 is capable of achieving higher deposition rates up to 40 Angstroms per minute for wide-area coverage and conformality by using its patented 'Cascade' biasing method. It also incorporates a careful optimization of pressure, power, and geometrical configurations of the magnetrons in order to improve uniformity performance. The power supplies are also designed to use an advanced protection circuit to protect against high voltage arcing and other abnormal performance. MRC 902 is equipped with an integrated planar tube power supply, which allows for coupling of the two 6 inch or 8 inch magnetrons while retaining the dual capability of single and double ended operation. This advanced feature enables 902 to achieve higher throughputs when running small and large substrates. Additionally, the planar tube power supply can be remotely controlled if multiple MRC 902s are mounted in a multichamber system. MRC 902 is also equipped with an automation mechanism that can be easily programmed to provide uninterrupted performance, allowing users to dramatically reduce reset and process times. This is further enhanced by its easy-to-use graphical software interface that can be used for process parameter adjustments and data retrieval. 902 is designed for use in a wide range of applications such as sputtering thin films, semiconductor device processing, optical coatings, data storage, and display monitors. Its high reliability and robustness makes it suitable for use in various industries including aerospace, automotive, and medical device manufacturing. Its features also make it a great choice for research and development applications where precise process control and flexibility are needed.
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