Used MRC 943 #9373252 for sale
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ID: 9373252
Sputtering system
Load locked RF and DC
With substrate heat and RF etch
(2) Planer cathodes
Inset cathode
Cathodes: 5" x 15"
Substrate carrier: 13" x 13"
CRT Screen
ADVANCED ENERGY MDX10K DC Magnetron power supply
ADVANCED ENERGY RFX II 3000 RF Generator.
MRC 943 is a sputter deposition instrument typically used in semiconductor, aerospace, medical, automotive, and other industrial applications. It is a three-beam, planetary-geometry sputter deposition equipment designed to produce high-quality, consistent layers of deposited material in a precise, repeatable, and cost-effective manner. The instrument offers a wide range of processing capabilities including physical vapor deposition (PVD), polymer deposition, and reactive sputter deposition. 943 consists of a three-beam sputtering source, a rotary axis, and a vacuum chamber. The sputtering source is equipped with three cathodes which are individually adjustable, offering the ability to sputter separate materials simultaneously. The separate cathodes allow for multi-process depositions which simplifies complex patterning operations. The three magnetic turbo gears provide up to 110 revolutions per hour of substrate rotation, allowing for uniform coatings. MRC 943's dual passage rotary axis minimizes process time and allows for multiple layers to be deposited in as little as five minutes. 943 system is capable of depositing materials with a wide range of properties including conductors, optical coatings, and thin-film barriers. The unit utilizes a wide range of sputtering gases and substrates can be programmed for rotation, cycling, conveying, and more. The instrument is highly configurable and offers users the ability to adjust parameters such as gas pressure and processing time to meet specific applications. Furthermore, MRC 943 offers superior process control and repeatability which makes it ideal for production environment applications. 943 is a powerful, precise, and cost-effective sputter deposition instrument that enables the production of high-quality, uniform deposited layers. It creates a wide variety of processed materials ideal for a variety of industrial applications including aerospace, medical, automotive, and more. MRC 943 machine offers users a number of capabilities, such as multiple cathode operation and rotary axis, to facilitate complex production operations. Additionally, the tool offers excellent process control and high precision for precise layers and superior results.
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