Used MRC / MATERIALS RESEARCH CORPORATION Eclipse #9238093 for sale

MRC / MATERIALS RESEARCH CORPORATION Eclipse
ID: 9238093
Wafer Size: 6"
Sputtering systems, 6".
MRC / MATERIALS RESEARCH CORPORATION Eclipse is a sputtering equipment designed for the production of thin-film layers. It is commonly used in the production of semiconductor, compound and optical thin-films. MRC Eclipse is a single-stage source/substrate sputter system with a heated substrate stage and an overhead load-lock for sample preparation. MATERIALS RESEARCH CORPORATION Eclipse model is equipped with a 13.56 MHz, 400 W, single frequency, magnetron sputtering source which is designed to flow 1-4 cm3/min of rare gas which allows for a higher target erosion rate. The source provides two sets of outputs, the first pulse provides fast sputtering which results in enhanced cleaning of the substrate, while the second pulse maintains a uniform coverage while creating a more uniform layer with fewer contaminants. Eclipse is designed to operate in either manual or fully automated modes. The automated mode has a computer interface that allows for easy unit operation and allows users to save and load their own recipes. The computer is also able to monitor the machine parameters such as pressure and the flow rate of the rare gas, allowing for precise control of the sputtering parameters. MRC / MATERIALS RESEARCH CORPORATION Eclipse has an active substrate temperature range of -150 to + 600°C, which allows for wide range of thin-film deposition applications such as oxidation and annealing of different materials. The active substrate positioner also enables sample loading from one positioner to another, making it easy to change samples between process runs. MRC Eclipse also has a host of features designed to maintain process repeatability and reduce downtime. It features an automated chamber cleaning cycle, and is designed to minimize sputtered material build up inside the chamber. It also has an automated in-situ quartz crystal monitor which allows for precise monitoring of thin film thickening and quality. All of these features make MATERIALS RESEARCH CORPORATION Eclipse a powerful sputtering tool capable of meeting the needs of a variety of thin-film deposition applications. Its repeatability, high temperature range, automated operation, and high sputter rate enable it to be a reliable and cost-effective deposition asset.
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