Used MRC / TEL / TOKYO ELECTRON Eclipse Star #9108496 for sale

MRC / TEL / TOKYO ELECTRON Eclipse Star is a sputtering equipment designed to provide superior deposition for a wide range of materials. This system's unique capabilities allow for improved uniformity and uniform covering of metal sputtered targets, as well as uniform deposition of dielectrics, metal oxides, and nitrides. MRC Eclipse Star is a dual-gun DC sputtering unit with dedicated plasma cleaning. It features a high-temperature bell furnace for annealing and thermal processing, and a high vacuum capability that can reach a base vacuum of 10-7 Pa. This makes it suitable for various processes involving gases and liquids, as well as sputtering and evaporation processes. The primary components are a two-gun sputtering source, a high temperature bell furnace, a plasma cleaner, an electron beam evaporation source, and a high vacuum pumping machine. The sputtering guns work by accelerating a beam of positively charged argon atoms towards the target material, resulting in sputtering. A powerful magnet array behind each sputter gun acts as a guide for the argon atom beam, resulting in uniform coverage of the target material. The high temperature bell furnace can be used to anneal or thermally process the wafer substrate at temperatures up to 1200C. This allows for better control of crystal structure and doping profile when processing III-V and II-VI materials, as well as for improved yields when working with metals. In addition, the combination of the furnace and sputtering guns allow for improved uniformity of deposition thickness and uniform coverage of large areas. TEL Eclipse Star is a reliable and proven deposition tool, designed for processes that require high levels of uniformity and uniform covering of sputter targets. Its features allow for reliable deposition of various materials and improved uniformity of films, enabling its use in a variety of sputtering applications.