Used MRC / TEL / TOKYO ELECTRON Eclipse Star #9222754 for sale

ID: 9222754
System (2) Compressor sets Fry pump Control PC included Targets: AlSi, Pure-Al, Ti Etch type: Hard etch Magnets: SPA SPA RMX RMA Power supply: (3) Master sets (3) Slave sets.
MRC / TEL / TOKYO ELECTRON Eclipse Star is a physical vapor deposition (PVD) sputtering equipment designed to deposit thin films of material onto a substrate in a controlled, efficient manner. MRC Eclipse Star is equipped with a 8" single wafer load lock chamber, which reduces contamination from the atmosphere. The system is compatible with a wide range of materials and substrates, making it perfect for a variety of custom coating applications. TEL Eclipse Star features a wide range of sputtering sources, including a planar magnetron, multi-piece target, or dedicated cathodes powered by a variety of RF and DC power supplies. This allows for the targeted deposition of material onto the substrates in a variety of formats. The unit also features low substrate heating technology, for improved uniformity of sputtered films while depositing on temperature sensitive materials. TOKYO ELECTRON Eclipse Star is designed for optimal process control, with a networked PC for user input and machine monitoring. It also features closed loop process control, allowing for accurate and repeatable coating performance with closed loop control of sputtering parameters. The tool is completed with a cluster of accessories, including temperature controllers, multi-gas valves, substrate rotation, and linear motion trackers. In addition, the asset features advanced process monitoring for improved process control, including an automated adjustment model allowing for quick and accurate process adjustments during deposition. It also includes a powerful collection of metrology software and hardware, including SECS/GEM protocol, that enables closed loop process control and real time process monitoring of process results. Eclipse Star is a cost-effective solution for a wide range of thin film deposition needs, providing efficient, reliable, and repeatable coating results. It features a modular design for easy installation and maintenance, and a wide range of sputtering sources, temperature control systems, and custom accessories that make the equipment suitable for custom workflows. The advanced process monitoring features and metrology hardware and software make MRC / TEL / TOKYO ELECTRON Eclipse Star the ideal solution for any thin film deposition application.
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