Used MRC / TEL / TOKYO ELECTRON Eclipse Star #9314540 for sale

MRC / TEL / TOKYO ELECTRON Eclipse Star is a sputtering equipment designed to provide high level of precision, accuracy, and reliability when performing thin film deposition and etching for applications such as the production of microelectronic, optoelectronic and micromechanical devices. The system consists of a high-vacuum chamber, low-vacuum chamber, and a series of process controllers and associated equipment. The sputtering unit is primarily used for the deposition of thin layers of metals, oxides, and nitrides on thin films or substrates. The machine's high-vacuum chamber operates at a vacuum level of better than 10-7 Torr, providing an ultra-low particle density for ultra-high purity deposition. The tool is designed to offer a range of pressure settings from 10-7 to 10-6 Torr. An automated load-lock asset is included for substrate loading and unloading, resulting in a clean and contamination-free environment. MRC Eclipse Star's low-vacuum chamber operates at 10-3 to 10-5 Torr, allowing for an intermediate area between the high-vacuum chamber and atmosphere. The low-vacuum chamber features multiple target locations that allow for the simultaneous sputtering of multiple deposition materials, allowing for a variety of thin layer microstructures. TEL Eclipse Star is powered by a series of advanced process controllers that can be programmed to monitor, regulate, and maintain a variety of key parameters. These controllers offer users precision control over such parameters as flow rate, pressure, and temperature. The model's software packages provide users with data monitoring, analysis, and control, allowing for increased process accuracy. Eclipse Star is designed to enable users to create thin films of high purity and low pinholes. The equipment is equipped with in-situ diagnostic mechanisms, such as an infrared camera that monitors sample temperatures during sputtering, and an optical emission spectrometer that monitors the optically excited state of each sputtered species. This allows users to precisely monitor the sputter deposition process. In other precision thin film deposition and etching applications, TOKYO ELECTRON Eclipse Star offers reliable and uniform films that provide an precisely tailored microstructures for the most demanding components. MRC / TEL / TOKYO ELECTRON Eclipse Star sputtering system is designed to offer users unmatched performance and reliability.