Used NOVELLUS / VARIAN 3190 #9216672 for sale
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NOVELLUS / VARIAN 3190 equipment is a multi-chamber, vacuum-based sputtering system used for thin film deposition on a variety of materials. It is designed to provide excellent thin film properties in an economically efficient and throughput-friendly manner. VARIAN 3190 utilizes a multi-chamber design with two main sections. The front chamber is the substrate transfer container, where all work with the substrate begins, including material handling, priming, sputtering, and post-treatment operations. The rear chamber is the vacuum chamber, where a high vacuum is produced under specific parameters. The vacuum chamber can be custom-tuned depending on materials, substrate size, deposition techniques, and other factors. In addition to the two main chambers, NOVELLUS 3190 also features an in-unit wafer magnetic tower, a semi-permanent batch director, and a fine-control magnetic sputter head. The magnetic tower contains two magnets that help stabilize film deposition by keeping the substrate in a stationary position. The semi-permanent batch director is a powerful in-chamber robotic arm that helps automate part of the material handling between chambers. The robotic arm also provides precise control over the deposition process. The fine-control magnetic sputter head is a precision-engineered component that is capable of precisely controlling the sputter time and power on up to four different cathodes. In addition to providing a user-friendly and consistent material handling/sputtering machine, 3190 is also recognized for its low-impact environmental design. The tool is capable of operation with a very low-flow capsule-vented chamber, making it ideal for both enclosed and open-air environments. It is also designed to allow for the use of environmentally-friendly solvents, thus reducing volatile organic compounds (VOC) release into the atmosphere. NOVELLUS / VARIAN 3190 asset is a reliable and efficient sputtering model, providing excellent deposition results. With its multiple chambers, robotic arm, and magnetic sputter head, the equipment provides an effective and flexible solution for a variety of deposition applications. Additionally, its design features make it an environment-friendly system, reducing VOC emission and cost.
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