Used NOVELLUS / VARIAN XM 90 #9226347 for sale

NOVELLUS / VARIAN XM 90
ID: 9226347
Wafer Size: 6"
Vintage: 1992
Sputtering system, 6" 1992 vintage.
NOVELLUS / VARIAN XM 90 is a sputtering equipment designed for research and development or production environment applications. VARIAN XM 90 is a digital, modular chamber that provides a high degree of control and flexibility in the deposition of thin films. The system features a 500mm by 500mm chamber and is composed of 5 sputtering sources, with varying target sizes from 10-60cm. It is designed to process a variety of materials, including metal, ceramic, and organic substrates. NOVELLUS XM-90 is designed to provide a number of options for process monitoring and optimization. It has an automated gas control unit for inert and reactive gas application, allowing for precise control of the plasma. Additionally, process parameters such as pressure, RF power, and temperature can be adjusted to customize process parameters. The integrated optical machine enables real-time monitoring of deposition conditions, and the closed loop feedback tool helps to ensure accurate films and repeatable results. NOVELLUS / VARIAN XM-90's design features a fast-drying bellows asset that allows for quick and easy sample loading and unloading. It is also designed to be mechanically compatible with a variety of other VARIAN machines, including the XM 70, XP-6010, and XP-61000, allowing for easy integration into an existing facility. Additionally, the model includes a comprehensive safety interlocks for both the operator and the equipment. XM-90 has a computer-controlled process cycle that allows for programmable process parameters, remote access, and automated recipe execution. Its easy-to-use Graphical User Interface (GUI) is designed to provide easy control and monitoring of process recipes. Additionally, VARIAN XM-90's control interface supports a network of computers linked and can provide remote access to XM 90. Overall, NOVELLUS XM 90 is an advanced sputtering system designed for both research and production environments. With its wide range of options and features, it allows for precise control and optimization of processes for repeatable, high-quality films. Additionally, the unit provides excellent safety features, easy integration into an existing facility, and remote access. Therefore, NOVELLUS / VARIAN XM 90 is an ideal choice for users seeking a reliable and versatile sputtering machine.
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