Used NRC / VARIAN 3117 #126817 for sale

NRC / VARIAN 3117 sputtering equipment is a high performance and reliable sputtering tool designed for efficient deposition of thin films. It is capable of depositing a variety of materials such as metals, oxides, nitrides, and aerogels. This system makes use of a combination of three processes: evaporation, ion bombardment, and sputtering. It has two fully-independent chambers with a choice of one of three magnetron configurations: magnetron, titanium, or indirect. The unit also includes two RF sources for both evaporation and sputtering, allowing for deposition with high deposition rates and enhanced uniformity. Additionally, the machine has a 4 " load lock capability and a sample drum in both chambers, which allows for quick and easy sample transfer and loading. NRC 3117 is equipped with an ultra-high vacuum tool with a base pressure of 10-6 Torr, guarantees superior thin film quality and uniformity. The RF sources can be used to control the frequency, power level, and pulse modulation, allowing for fine tuning of the deposition parameters. The asset also has a PC control interface for monitoring and setting conditions, as well as an adjustable gas distribution model with mass flow controllers (MFC) for setting a variety of process parameters. VARIAN 3117 features an easy-to-use RF sputter rotating collar equipment, which allows for precise control of the angle of sputtered material. Additionally, the system has a built-in high-voltage electrical safety unit, which monitors the voltage at the source and prevents potentially hazardous situations. The machine also includes a range of accessories such as a sample pedestal for secure handling, resistant heating elements for heating samples, and a choice of several magnetic and inert gas sources for improved control of the film properties. 3117 is designed to be a user-friendly tool, with intuitive user-control software and a variety of features making it easy to use. The high-precision deposition techniques, low thermal budget, and reliable build quality make it a great choice for a variety of deposition applications. NRC / VARIAN 3117 is an ideal tool for creating thin film structures with high rates and uniform films of superior quality.