Used NRC / VARIAN 3117 #293621573 for sale
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NRC / VARIAN 3117 is a state-of-the-art sputtering equipment designed for efficient deposition of thin films and membranes of various materials. It can be used to fabricate diverse types of thin films and membranes, such as those made of metals, semiconductors, dielectrics, and polymers. The system is composed of two main components: the sputtering source and the vacuum chamber. The sputtering source is a powerful magnetron with three planar magnetrons and two rotating magnets that generate an intense magnetic field. This magnetic field causes a cascade of energetic electrons in the source chamber. These electrons bombard the target material and eject atoms from its surface, creating a neutral atom cloud. This atom cloud, or plasma, is then transferred to the vacuum chamber, where it deposits thin films or membranes on the substrate. The vacuum chamber is a cylindrical stainless steel vessel capable of achieving a base pressure of 1 x 10-6 Torr or lower. It houses a substrate setup, support arms, a manually adjustable nozzle, heaters and resistors for temperature control, and other auxiliary components. The substrate setup consists of a rotating substrate mount, a rotation speed up to 1000 RPM, and an optional wafer holder. The support arms hold the nozzle in place and the optional wafer holder provides a stable surface for thin film deposition. Temperature control is achieved through the use of heaters and resistors placed in the substrate setup. Additionally, NRC 3117 unit features a comprehensive control panel for setting parameters, monitoring performance, and controlling the machine. The panel is composed of a processor unit, an analog control board, and a digital control board. The processor unit allows the user to set parameters such as power, target material, and deposition rate, while the analog and digital control boards monitor and regulate the performance of the tool. In short, VARIAN 3117 is a reliable sputtering asset that provides superior precision and control when fabricating thin films and membranes. It offers efficient deposition of a wide variety of materials and its sophisticated control panel allows users to monitor and optimize model performance. With its advanced features and reliable performance, 3117 is an ideal choice for thin film and membrane fabrication.
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