Used NRC / VARIAN 3117 #293625152 for sale

NRC / VARIAN 3117 equipment is a sophisticated sputtering system capable of producing complex multilayer thin films. It comprises of several different components, namely a sputter chamber, a target loadlock and a variable high-vacuum pumping unit. The sputter chamber is a fully enclosed and water-cooled stainless steel chamber. It is equipped with two independently contoured planar, dual magnetron sources with digitally controlled variable power. This allows for the sputtering of precisely and accurately defined target shapes with very high deposition rates. The target loadlock is a robust automated chamber for the transport of sputtering materials into the sputter chamber. It also features load-matching capability that allows for the transfer of materials with minimal back pressurization. The variable high-vacuum pumping machine provides optimal process control and allows for a broad diversity of solids and gases to be sputtered. The tool also incorporates several process-specific special features, such as a sample-platen holder assembly, a closed-cycle refrigeration asset and sample-in-sputter cleaning and in-sputter degassing capabilities. Overall, NRC 3117 sputtering model is an advanced piece of technology that is capable of producing high-quality, complex multi-layer thin films with optimal accuracy, repeatability and reliability.