Used NRC / VARIAN 3117 #9160339 for sale

NRC / VARIAN 3117 is a large-area sputtering equipment that utilizes inert gases for material deposition. It features two high-power magnetron sputtering heads mounted on a two axis motorized precision stage. Each head is powered by a 5kW or 20kW of DC power generating up to 70mA and 160mA of ion current respectively. The system is equipped with a multi-gas capability to control the process atmosphere with up to 8 independent gases. It includes an automated digital process controller with pre-programmed process recipes for easy operation. NRC 3117 has a large 60 cm by 40 cm main chamber equipped with an integrated load lockdown mechanism for easy sample loading. This allows for up to four targets to be mounted onto the two sputtering heads simultaneously. The unit also incorporates a 12" rotatable substrate holder capable of accommodating various sizes and shapes of substrates. VARIAN 3117 utilizes a sophisticated quartz-based inert gas distribution machine to ensure accurate, uniform distribution of the sputtering gases throughout the chamber. This dual-controlled manifold tool can be operated independently or can be used to mix gases in order to achieve the desired process atmosphere. The pressure in the chamber is monitored and adjusted using the precision mass flow controllers which are calibrated for accuracy. 3117 also features an in-situ asset monitoring feature called 'Pulse Counts' which is an indicator of the model's overall performance. As well, the equipment has the capacity to store up to 10 different process recipes along with detailed diagnostic information. NRC / VARIAN 3117 sputtering system is engineered to deliver maximum yields of large area thin films for a wide variety of processes. With its large chamber, precise control, versatile gas systems and variable sputtering head power it can be tailored to meet any specific deposition needs. NRC 3117 sputtering unit is designed to ensure superior performance and long lasting results for many years of reliable service.