Used OCLI M1044 #293591854 for sale
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ID: 293591854
Sputtering system
Vacuum chamber with (4) sputtering sources
(4) PFEIFFER Turbo molecular pumps with power suppliers
(2) ADVANCED ENERGY Pinnacle Ion gun, 12 kW
(3) DC Engines
(3) Drives
(6) DC Power supplies: (3+3) Master (20 kW) / Slave (10 kW)
(2) MDX Sparc-LE 20, Si target: (1+1) Master / Slave
(2) MKS 647B Multi gas controllers
(3) MAGNETRON Sputter cathodes
(20) Metal holders, 18 x 139 cm
(4) Silicon targets
(3) Niobium targets
Zirconium
HONEYWELL PLC
MKS Stabil-Ion Controller
GRANVILLE PHILLIPS Series 370 Vacuum sensor
GRANVILLE PHILLIPS Vacuum gauge
MKS Mass Flow Controller (100 to 1000 SCCM)
(2) Bias voltage sources
Bias voltage suppliers
VAT Gate and actuators
(3) MDX Display
(2) Pinnacle Display
(2) Computers
Monitor
Frame
Spare parts.
OCLI M1044 is an advanced deposition equipment used in the production of advanced microelectronic devices. This system is capable of high-quality sputtering, and it can be used in a variety of applications, including optoelectronic, MEMS, and integrated circuit (IC) production. The unit is built with advanced components and offers excellent performance. The machine consists of a magnetron sputtering source, which is used to deposit a thin film of material onto the working substrate. The source is designed for superior sputtering results, with a target diameter ranging from 2 to 8 inches. In addition, the tool is equipped with temperature control to ensure temperatures remain consistent throughout the deposition process. The asset also features a rotatable substrate holder and RF assistance, which help ensure the highest quality deposition results. Furthermore, M1044 is designed with a process chamber that allows for quick and easy installation and maintenance of components. This is important for rapid and efficient production. Other features of OCLI M1044 include superior deposition rate, excellent uniformity, high-yields, and a small footprint. It is capable of high aspect ratio etching, and it can also be used to create nanoscale features. Moreover, the model has advanced controls that help users adjust process parameters. M1044 is an advanced equipment that yields a high-quality product. Its advanced components and features allow users to produce nanoscale features quickly and with precision. This makes it ideal for a variety of applications, including MEMS, advanced optoelectronics, and IC production. The system is reliable, efficient, and well-suited for a variety of production needs.
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