Used OERLIKON / BALZERS / EVATEC Clusterline 200 #293635940 for sale
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ID: 293635940
Sputtering system
(5) CTI Pumps (Including TMC)
(3) CTI Compressors
(2) Rough vacuum pumps
Turbo pump and controller
Residual gas meter.
OERLIKON / BALZERS / EVATEC Clusterline 200 is an advanced sputtering equipment specifically designed for the production of thin films. It is composed of several components, including arc-jet ion sources, RF-substrate bias sources, as well as a high-frequency power generator and a chamber for sputter deposition. The system is highly automated and user friendly, allowing for complete control over the deposition process and providing excellent process repeatability over multiple substrate sizes. This flexibility allows for a very wide range of substrates to be prepared. EVATEC Clusterline 200's arc-jet ion source provides strong, stable ion bombardment, producing high-density, high-rate etch and sputter deposition. This source also ensures uniformity of the etching and deposition processes across multiple substrates, resulting in thinner film layers with fewer defects. The RF-substrate bias source increases the etch rate and enhances the uniformity of deposited layers over large, flat surfaces. The high-frequency power generator offers an adjustable power output that can be adjusted to meet the needs of different applications, enabling for long-term stability and maximizing the lifespan of the deposited layers. BALZERS Clusterline 200's chamber uses helium insulation to reduce the possibility of contamination and oxidation. It also uses a unit of sensors to monitor the deposition process, allowing for quick troubleshooting should a problem arise. In addition, OERLIKON Clusterline 200 also offers advanced safety features, such as an advanced monitoring machine, next-generation chamber seals, and a process control unit to monitor and report on any errors or unsafe conditions. All components are also designed to protect users from potential hazards and health risks associated with sputtering systems. Overall, Clusterline 200 is an excellent choice for any application requiring a reliable, high-quality sputtering tool. With its advanced features, it offers a great degree of user control and flexibility, excellent safety features, and superior film layer quality.
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