Used OERLIKON / BALZERS / EVATEC Clusterline 200 #293800020 for sale
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ID: 293800020
Wafer Size: 12"
Sputtering system, 12"
(3) Process chambers:
PC-1 (P-Layer)
PC-2 (I-Layer)
PC-3 (N-Layer).
OERLIKON / BALZERS / EVATEC Clusterline 200 is a sputtering equipment used to coat a variety of materials with a thin protective film. This system utilizes inert gases that carry cations of the elements to be deposited onto the substrate, where a negative charge is created. The cations are then accelerated towards the substrate which creates a dense, uniform and conformal layer of material. Sputtering is used in a variety of industries to provide coating services such as electrical insulation, wear-resistance, surface stabilization, wear and corrosion protection, adhesion and surface properties, and light reflection. This sputtering unit has several components including vacuum pumps and an evacuation chamber, a target assembly, ion source and an electronics control machine. The vacuum pumps evacuate the chamber, removing contaminants and oxygen, then it creates a vacuum necessary for sputtering. The target decounts supply metal or metal compounds in the form of a flat target. An ion source produces cations that are accelerated through the chamber towards the substrate to create the desired coating. Finally, a computer control tool is used to monitor and control the process. EVATEC Clusterline 200 is designed specifically to provide high-quality, reproducible, industrial-grade sputtering processes. Its process quality is achieved through the use of innovative substrate holder design which is capable of accommodating substrates up to 200mm in size. In addition, the asset includes a horizontal rotating direct sample holder for single directional sputtering, enables for faster sputtering rates and an enhanced uniformity of coating thickness. BALZERS Clusterline 200 sputtering model is an efficient and reliable equipment for coating materials for a wide range of applications. The system's robustness and versatility provides a fast and reliable turnkey solution for research and production processes that require high-grade sputtering results. In addition, its advanced features, such as multi-zone operation, automatic substrate positioning, and use of inert gases during the sputtering process, make the unit not only highly reliable but also user friendly. This allows for fast and safe operation leading to a high degree of automation. Lastly, OERLIKON Clusterline 200 provides reliable coating, ensuring a high-quality output.
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