Used OERLIKON / BALZERS LLS EVO #9081784 for sale
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ID: 9081784
Wafer Size: 6"
Vintage: 2000
Load lock sputtering system, 6"
Process: TaN
Polycold set up for both chambers
12 wafers per run
Could run 4 targets
Computer and Windows 7 included
Cryo pump load chamber
Turbo main chamber
Currently de-installed
1999-2000 vintage.
OERLIKON / BALZERS LLS EVO is a sputtering equipment designed for use in the production of electronic components. It is a medium-power, high-capacity tool that is ideally suited for both industrial and research applications. The system provides an easy-to-use solution for the thin-film deposition needs of modern businesses, such as passivation, metalization, and vacuum deposition. BALZERS LLS EVO is designed to offer a high degree of flexibility in sputtering processes. It is capable of depositing a wide range of materials, including metals, oxides, and dielectrics, while also offering a variety of sputtering techniques to ensure optimal efficiency. The unit consists of a multi-zone vacuum chamber for sputtering processes, a computer-controlled controller for precise material deposition control, and an advanced sputter target attachment machine for efficient target exchange. In addition to the high degree of flexibility and performance, OERLIKON LLS EVO offers a wide range of features such as automated process control, high-power sputtering capability, high-precision field emission scanning electron microscopy, and powerful data analysis tools. It is also designed to have a long lifespan, with multiple steps for preventive maintenance such as regular cleaning and periodic sensor calibration. This helps to ensure a high-quality product with consistent results each time. Overall, LLS EVO is a robust sputtering tool that is capable of producing high-quality thin-film materials. It offers the flexibility to handle a wide range of materials and techniques, while also providing advanced features like computer-controlled process control, high-precision field emission scanning electron microscopy, and powerful data analysis tools. With its long lifespan and reliable performance, OERLIKON / BALZERS LLS EVO is a perfect tool for a variety of production applications.
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