Used PERKIN ELMER 4400 #9283424 for sale
ID#: 9283424
Sputtering system
PLC Upgrade
(3) RF Diode target assemblies
Etch
Table motor: Encoder for accurate and repeatable positioning
Power supplies
Cryopump
RF Power supply: 1200 W
Chambers:
Upgraded chamber and frames
No alignment
Table:
Upgraded motors
No realign wafer transfer
Ferrofluidic table assembly
Target assembly:
Magnet for higher utilization of targets cathode, 8"
INSTRUTECH Direct feed to PLC
Air manifold: Modular connections
Touchscreen:
Display
Interface: OPTO 22
INTEL Computer.
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Manufacturer:
PERKIN ELMERModel:
4400Category:
SPUTTERING SYSTEMSEquipment Details:
PLC Upgrade
(3) RF Diode target assemblies
Etch
Table motor: Encoder for accurate and repeatable positioning
Power supplies
Cryopump
RF Power supply: 1200 W
Chambers:
Upgraded chamber and frames
No alignment
Table:
Upgraded motors
No realign wafer transfer
Ferrofluidic table assembly
Target assembly:
Magnet for higher utilization of targets cathode, 8"
INSTRUTECH Direct feed to PLC
Air manifold: Modular connections
Touchscreen:
Display
Interface: OPTO 22
INTEL Computer.
