Used PERKIN ELMER 4410 #9201791 for sale

Manufacturer
PERKIN ELMER
Model
4410
ID: 9201791
Wafer Size: 8"
Sputtering system, 8" Wafer loading: Manual With load lock Cathodes: Delta shape, 3 max Sputter methods: RF / DC Diode / MAGNETRON Gas lines: 1~3 MFC Options: Gas lines with MFC N2 O2 Customized Lamp tower alarm with buzzer: Mechanical pump / Dry pump for process chamber and load lock Independent mechanical pump / Dry pump for process chamber Chiller for cooling plates and table Turbo pump for load lock Load lock lamp heating function: Up to 200°C Chamber lamp heating function: Up to 300°C Plasma etch function Bias function Co sputter function Reactive sputter function Main frame 28" Diameter SST chamber top plate with ports and cathodes: Configuration 4400 4410 / 4450 Cathode shape Circle Delta Cathode size 8" Delta Cathode quantity 1 to 4 1 to 3 Sputter power supply: 4400 4410 / 4450 DC Power 5 kW 5 kW / 10 kW RF Power 1kW / 2kW 2 kW / 3 kW Pulse DC Power 5 kW 5 kW / 10 kW Process chamber: 8" Diameter x 12" High stainless steel cylinder with 6" CF Flange view port and load lock port 28" Diameter stainless steel base plate 11/2" Air operated roughing isolation valve Air operated gas inlet valve Air operated vent valve 11/2" Blanked-off leak check port Removable deposition shields 23" Diameter, 3-position water cooled annular substrate Table with variable speed motorized table drive Full circle shutter and vane shutter Chain drive pallet carrier transport Heavy duty electric hoist Load lock: 30" x 28" x 8" Stainless steel load lock chamber Aluminum cover Chain drive pallet carrier transport 2" Air operated roughing isolation valve Air operated vent valve 23" Diameter molybdenum annular substrate pallet Elevator for pallet up and down function Vacuum systems for process chamber: (2) Stage cryo pumps With 1000 l/s pumping speed for air Includes: Chevron Water cooled compressor and lines Automatic regeneration controller Plumbing kit, 71/2" Aluminum air operated gate valve: 6" ASA Air operated venetian blind throttling valve Mechanical pump or dry pump for process: 36.7 Cfm Chamber and load lock Replaced obsolete controls: Auto pump down controller Load lock controller Digital clock timer Table raise / Lower control Throttle valve control system Pressure control system Sputter head controls Gas line with MFC Ar, 200 SCCM, customized Power box: AC 380 V / 208 V / 3 Phase.
PERKIN ELMER 4410 is a sputtering equipment designed with a highly versatile feature set, making it a popular choice for electrical, microelectronics and semiconductor applications. This highly capable system consists of two primary components; the sputter gun, and an integrated chassis that houses the control and power components. The sputter gun at the heart of 4410 has an adjustable power supply ranging between 40 to 350 Watts. This allows the user to tailor the unit's deposition rate to match the needs of their current project or application. Additionally, the sputter gun design is highly modular enabling it to use a variety of different sputtering targets including evaporated, magnetron and diode designs. The integrated chassis of PERKIN ELMER 4410 is where the control and all power components reside. The control unit facilitates automated operations as well as manual mode options. This includes a preprogrammed course of action where parameters like pressure and temperature can be specified, as well as manual operations to fine tune the sputtering process. The power unit consists of a number of transformers and rectifiers needed to convert the incoming AC power up to the required DC power for the sputter gun. 4410 is designed to be used in cleanroom-type environments and has been engineered with safety in mind. It contains an emergency shut-off button to enable quick shutdown of the machine in case of emergency, and its exhaust is vented outside to ensure minimal exposure of hazardous materials. In summary, PERKIN ELMER 4410 is a versatile, high-performance sputtering tool with excellent control and power components, allowing it to be used in a variety of industrial and research related applications. It is designed for exceptional safety and with the modular sputter gun and integrated controls, users have the peace of mind for customizing their asset for the precise needs of the current project.
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