Used PERKIN ELMER 4410 #9201791 for sale
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ID: 9201791
Wafer Size: 8"
Sputtering system, 8"
Wafer loading: Manual
With load lock
Cathodes: Delta shape, 3 max
Sputter methods: RF / DC
Diode / MAGNETRON
Gas lines: 1~3 MFC
Options:
Gas lines with MFC
N2
O2
Customized
Lamp tower alarm with buzzer:
Mechanical pump / Dry pump for process chamber and load lock
Independent mechanical pump / Dry pump for process chamber
Chiller for cooling plates and table
Turbo pump for load lock
Load lock lamp heating function: Up to 200°C
Chamber lamp heating function: Up to 300°C
Plasma etch function
Bias function
Co sputter function
Reactive sputter function
Main frame
28" Diameter SST chamber top plate with ports and cathodes:
Configuration 4400 4410 / 4450
Cathode shape Circle Delta
Cathode size 8" Delta
Cathode quantity 1 to 4 1 to 3
Sputter power supply:
4400 4410 / 4450
DC Power 5 kW 5 kW / 10 kW
RF Power 1kW / 2kW 2 kW / 3 kW
Pulse DC Power 5 kW 5 kW / 10 kW
Process chamber:
8" Diameter x 12" High stainless steel cylinder with 6"
CF Flange view port and load lock port
28" Diameter stainless steel base plate
11/2" Air operated roughing isolation valve
Air operated gas inlet valve
Air operated vent valve
11/2" Blanked-off leak check port
Removable deposition shields
23" Diameter, 3-position water cooled annular substrate
Table with variable speed motorized table drive
Full circle shutter and vane shutter
Chain drive pallet carrier transport
Heavy duty electric hoist
Load lock:
30" x 28" x 8" Stainless steel load lock chamber
Aluminum cover
Chain drive pallet carrier transport
2" Air operated roughing isolation valve
Air operated vent valve
23" Diameter molybdenum annular substrate pallet
Elevator for pallet up and down function
Vacuum systems for process chamber:
(2) Stage cryo pumps
With 1000 l/s pumping speed for air
Includes:
Chevron
Water cooled compressor and lines
Automatic regeneration controller
Plumbing kit, 71/2"
Aluminum air operated gate valve: 6" ASA
Air operated venetian blind throttling valve
Mechanical pump or dry pump for process: 36.7 Cfm
Chamber and load lock
Replaced obsolete controls:
Auto pump down controller
Load lock controller
Digital clock timer
Table raise / Lower control
Throttle valve control system
Pressure control system
Sputter head controls
Gas line with MFC
Ar, 200 SCCM, customized
Power box: AC 380 V / 208 V / 3 Phase.
PERKIN ELMER 4410 is a sputtering equipment designed with a highly versatile feature set, making it a popular choice for electrical, microelectronics and semiconductor applications. This highly capable system consists of two primary components; the sputter gun, and an integrated chassis that houses the control and power components. The sputter gun at the heart of 4410 has an adjustable power supply ranging between 40 to 350 Watts. This allows the user to tailor the unit's deposition rate to match the needs of their current project or application. Additionally, the sputter gun design is highly modular enabling it to use a variety of different sputtering targets including evaporated, magnetron and diode designs. The integrated chassis of PERKIN ELMER 4410 is where the control and all power components reside. The control unit facilitates automated operations as well as manual mode options. This includes a preprogrammed course of action where parameters like pressure and temperature can be specified, as well as manual operations to fine tune the sputtering process. The power unit consists of a number of transformers and rectifiers needed to convert the incoming AC power up to the required DC power for the sputter gun. 4410 is designed to be used in cleanroom-type environments and has been engineered with safety in mind. It contains an emergency shut-off button to enable quick shutdown of the machine in case of emergency, and its exhaust is vented outside to ensure minimal exposure of hazardous materials. In summary, PERKIN ELMER 4410 is a versatile, high-performance sputtering tool with excellent control and power components, allowing it to be used in a variety of industrial and research related applications. It is designed for exceptional safety and with the modular sputter gun and integrated controls, users have the peace of mind for customizing their asset for the precise needs of the current project.
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