Used PERKIN ELMER 4450 #9251060 for sale

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Manufacturer
PERKIN ELMER
Model
4450
ID: 9251060
Sputtering system (3) DELTA Targets and etch Used for thin silicon R&D tri metal (Ti ,Ni, Ag) Spare parts: Qty / Part number/ Description (3) / PES-120-018-000 / O Ring BS259 (7) / PES-120-018-000 / O Ring BS259 (5) / PES-120-018-000 / O Ring BS259 (3) / PES-120-019-000 / O Ring BS214 Viton (6) / PES-120-121-000 / O Ring BS222 Viton (2) / PES-120-144-000 / Switch micro (BA-2RV22T) (4) / PES-121-165-000 / Circlip - External 1/2" (1) / PES-121-189-200 / Circlip - External 1/4" (4) / PES-121-381-400 / O Ring BS426 Viton (10) / PES-121-392-000 / O Ring BS252 Viton (8) / PES-121-392-000 / O Ring BS252 Viton (20) / PES-121-394-500 / O Ring BS116 Viton (7) / PES-121-395-300 / O Ring BS210 (2) / PES-121-395-800 / O Ring BS234 (7) / PES-121-396-700 / O Ring BS266 (3) / PES-121-396-900 / O Ring BS268 (2) / PES-121-401-400 / Belt timing 100 Xl (2) / PES-121-411-600 / Bearing (1) / PES-121-412-500 / Bracket (1) / PES-121-412-600 / Bracket (9) / PES-121-420-400 / O Ring BS131 (1) / PES-121-420-400 / O Ring BS131 (2) / PES-121-423-900 / O Ring BS272 (10) / PES-121-423-900 / O Ring BS272 (2) / PES-121-424-000 / O Ring BS278 (9) / PES-121-424-000 / O Ring BS278 (1) / PES-121-425-700 / Circlip internal 2" (1) / PES-121-430-000 / Circlip internal 2 3/4" (1) / PES-121-430-800 / FAFNIR KP33B Bearing ball (1) / PES-121-432-400 / Ring retaining 2 1/8"OD (1) / PES-121-947-100 / Resistor assy 15K Ohm (2) / PES-121-964-910 / Bearing (204NPD) W-2Z (8) / PES-122-026-600 / Fuse-1/8 Amp (1"x1/4") (2) / PES-122-074-500 / Switch push button (2) / PES-122-082-500 / Capacitor-WBR+1000-35 (2) / PES-122-142-800 / I.C 74C76 (1) / PES-122-142-900 / I.C 74HCT10 (1) / PES-122-148-500 / DAYCO 150L050 timing belt (1) / PES-122-154-200 / Motor stepper 120 Volt (5) / PES-122-165-900 / O Ring BS128 (2) / PES-122-165-900 / O Ring BS128 (2) / PES-122-165-900 / O Ring BS128 (1) / PES-122-202-400 / I.C 74HCT00 (100) / PES-122-202-500 / CD74HCT04E - IC (Farnell 381-081) (2) / PES-122-245-600 / POTTER&BROOMFIELD Relay 115V (5) / PES-122-267-500 / Washer steel 1 1/4OD x 3/4ID x 1/8 (2) / PES-122-268-400 / Capacitor variable 20-500 uF (1) / PES-122-275-600 / I.C MCA 22312 (4N32 Equiv) (1) / PES-122-283-790 / Switch toggle Op (C&K 7415) (2) / PES-132-101-200 / Choke (Ohmite Z-7) (1) / PES-132-509-300 / Timer (Syracuse DDR-00305) (1) / PES-133-223-000 / Capacitor 500 mF 25VDC (2) / PES-133-272-100 / Capacitor 500M 6Kv 25V (2) / PES-134-021-200 / Rheostat 15K (Ohmite 4202 15000) (1) / PES-134-354-000 / Resistor assy 3K (1) / PES-134-402-000 / Resistor assy 33K (1) / PES-134-403-000 / Resistor assy 100K (1) / PES-134-407-000 / Resistor assy 5.6K (1) / PES-134-951-500 / Resistor 22.5K (2) / PES-135-444-400 / Switch rocker Op (C&K 7201) (2) / PES-135-445-500 / Strip grounding (2) / PES-135-921-200 / Head relay brd 24 V AC .K3 (2) / PES-135-921-900 / Relay 120V AC (Sigma78Re1) (1) / PES-135-922-000 / Relay 28V DC / 120V AC (1) / PES-135-928-200 / POTTER&BRUFIELD Khu17D11 Relay (2) / PES-136-300-400 / Ring PTFE 1/4" ID (2) / PES-136-634-000 / Transistor 2N1559 (2) / PES-139-003-000 / Insulator ceramic (5) / PES-139-008-700 / Insulator ceramic (3) / PES-139-008-700 / Insulator ceramic (1) / PES-139-008-800 / Insulator ceramic (1) / PES-178-146-000 / Motor 7RPM 120 Volt (5) / PES-179-632-000 / Fuse (Buss GMA1O) 3/16 x 3/4 (1) / PES-220-965-000 / Clamp bar (2) / PES-220-965-100 / Clamp bar (1) / PES-221-079-300 / Block S/S 1" X 4 1/2" X 1/4" (2) / PES-221-177-600 / PCB LN2 control (3) / PES-221-180-200 / Switch rocker Op (Micro4TPL-7) (1) / PES-221-274-900 / Gasket (1) / PES-221-279-500 / Assembly feed through (1) / PES-221-279-900 / Flange transport drive assy. (1) / PES-221-281-500 / Assembly Feed Through (2) / PES-221-296-100 / Water feed through (6) / PES-221-340-900 / Strip grounding (1) / PES-221-582-900 / PCB Filter board (1) / PES-2E26 / Beam amplifier (1) / PES-500-579-500 / Seal assy 1 5/8" OD (1) / PES-500-585-400 / Bellows 1 1/2" Valve (2) / PES-500-827-700A / Bellows Assy (1) / PES-6AG7 / Receiving tube (3) / PES-721-369-000 / Transformer (5) /PES-721-384-000 / Washer fibre 1/2"OD X 1/8"ID (10) / PES-AM33K3 / Bearing - Inner door (5) / PES-B221-210-000 / Clip heater (1) / PES-B221-462-700 / Motor Stepper 120 Volt (1) / PES-D220-948-700 / Valve bellows 2" (2) / PES-MI-100-KF / Gauge Ion-Mi-100-Kf.
The PerkinElmer PERKIN ELMER 4450 is a sputtering equipment designed for the deposition of metal and dielectric films in thin film manufacturing processes. It offers the best of both worlds; an industry-standard twin-gun cathode sputtering source and a unique double-width nozzle source for highly uniform deposition of dielectric films. The system is capable of depositing layers of metal or dielectric materials with high definition and exceptional uniformity on wafers up to 8 inch diameter. The PerkinElmer 4450 comprises a vacuum chamber, power supply, and high-frequency (HF) generator. It supports a wide variety of processes including continuous and pulsed sputtering, reactive ion mode sputtering (RIMS), and the deposition of different materials simultaneously from dual separate sources. The unit can accommodate two sources - a location specific twin-gun cathode sputtering source and a double-width nozzle source for dielectric films. The source voltage and power are adjustable, allowing control of the deposition rate and film thickness. The advanced power supply of the PerkinElmer PERKIN ELMER 4450 offers independent and programmable power settings for each source, further allowing for process optimization. The machine also features a sample holder with a lift tool for loading and unloading up to eight wafers - it can accommodate wafers up to 200 mm in diameter. The motion of the sample holder is controlled by an actuator, with a position repeatability of better than 1 micron. The holder can be rotated (CW and CCW) and tilted in the range from -10 to +10° at up to 395 rotations per minute. The asset also features an automated auto-focus sensor and an in-situ quartz monitor to ensure accurate film thickness control. Finally, the PerkinElmer 4450 includes a number of safety features such as an emergency stop and interlocks on the chamber, sources, and wafer holder. The model is designed for semiconductor processing in a controlled environment. To maintain high levels of process repeatability and reduce sputter particle and background contamination, the equipment can be purged with process gases, nitrogen or other gases. In summary, the PerkinElmer PERKIN ELMER 4450 is an advanced, high-precision sputtering system designed to provide uniform thin-film deposition with high process repeatability and accuracy. Its in-situ quartz monitor and automated auto-focus sensor ensure easy and precise control of critical film parameters while the integrated safety measures provide reliable process optimization.
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