Used PLASMATHERM / UNAXIS Clusterline 300 #9123065 for sale
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ID: 9123065
PVD System, 12"
(5) Chamber UBM sputter tool
(1) SE Chamber arctic
(1) Degas
(1) PVE Arctic
(3) PVD Clampless
Dual server / Arctic soft etch
2006 vintage.
PLASMATHERM / UNAXIS Clusterline 300 is a reliable and advanced sputtering equipment. It is a comprehensive system for the deposition of thin-film metallic, insulating, and semiconductor materials by magnetron sputtering. The unit is designed to process four 8" substrates, or two 12" substrates at a time. Its compact design allows it to provide excellent performance and cost-effectiveness. The machine features an automated material deposition process and an intelligent monitoring with numerical PLC control tool. It utilizes an optimized substrate-based motion and advanced process parameter control. In addition, the asset is equipped with dual magnetron sources to ensure uniform material deposition. The model also includes rotating assist and hybrid (plasma) sources for improved step coverage. UNAXIS Clusterline 300 is also equipped with a broad range of integrated source and substrate materials. This includes metals, insulators, optical coatings and PECVD-polymers. The equipment also features an advanced temperature control system, with an advanced temperature monitor that ensures an accurate and stable temperature throughout the unit. PLASMATHERM Clusterline 300 also features an innovative advanced substrate cleaning machine, which ensures the highest quality thin-film deposition. This tool also reduces feed-through, contamination and shadowing, while ensuring a uniform thickness across all four substrates. In addition, the asset features an advanced Quasi-Total-External-Reflectometer (QTTR) for real-time thin-film monitoring. Clusterline 300 is a flexible and high performing model which offers the highest productivity for thin-film deposition. It is reliable, cost-effective, and has a long machine life.
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