Used ROBUST 300 #293596982 for sale

Manufacturer
ROBUST
Model
300
ID: 293596982
Wafer Size: 12"
PVD Sputtering system, 12" Chamber Chiller (2) Loadports (5) Pumps Robot RF Generator rack Voltage box.
ROBUST 300 is an industrial-grade sputtering equipment designed to reliably provide deposition rates with exacting control and accuracy. The system features a powerful, three-targets DC sputtering source which can be used to deposit layers of material onto substrates as thin as a few nanometers. The unit can operate in a wide range of temperatures, thanks to an integrated variable frequency drive, and can handle temperatures up to 600°C. It is controlled by a programmable logic controller (PLC) and can be fully automated for repeatable processes. The machine is composed of a process chamber, a turbo-molecular pump, and a three-target magnetron sputtering source. The process chamber is designed specifically to maximize process uniformity across the entire substrate or workpiece, utilizing a pair of graded-impedance, full-magnetron-entrance, multiple-pulse sources. The turbo pump helps to ensure a vacuum quality that is efficient and energy-saving. The three-target magnetron sputtering source is the heart of 300, featuring a powerful tool configuration capable of generating energetic ion bombardment and delivering uniform film adhesion. Additionally, the process chamber is equipped with a noise-suppression mechanism and interference-free operation, making it ideal for use in harsh industrial environments. The asset is highly reliable and easy to use, and its ROBUST design makes it a reliable choice for high-precision coating requirements. The model has undergone ASEP certification since its introduction, ensuring accuracy, chemical and physical stability, and equipment longevity. Additionally, ROBUST 300 can be integrated with a variety of accessories and software, allowing automated control over the entire sputtering process. In summary, 300 is a reliable and powerful sputtering system designed to meet the exacting requirements of industrial applications. With features such as a noise suppression unit, an efficient turbo pump, and an ASEP certified machine, it offers a reliable and accurate solution to the high-precision coating needs of industrial users.
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