Used SEMICORE / MRC SEC-643 #9250939 for sale
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SEMICORE / MRC SEC-643 is a metal-organic chemical vapor deposition (MOCVD) sputtering equipment designed for semiconductor deposition applications. It is equipped with four high-performance Schottky ion sources which enable high rate deposition. The system has a versatile power supply configuration that offers maximum control and flexibility. It is capable of delivering up to 450 W power for a range of deposition technologies. MRC SEC-643 is equipped with two large target platforms, which allow for simultaneous deposition of up to four films. Additionally, targets may be rotated in any direction for maximum conformal growth. The unit also features an adjustable chamber pressure control that allows for optimal process conditions, ensuring the highest quality films. SEMICORE SEC-643 machine also provides a Class 1 clean environment for the deposition processes. The tool includes a vapor capture asset, a force-flow model, and a high-capacity filtration equipment. The vapor capture system ensures minimal vapor loss, while the force-flow unit ensures that chamber air is filtered through the high efficiency particulate air (HEPA) filter. The high-capacity filtration machine includes deep pleated filters, as well as deep-bed activated charcoal filters. SEC-643 tool includes an ultra-low vibration robust load lock for reliable, clean chamber loading and efficient sample exchange. It is engineered for easy start-up and maintenance, ensuring minimal downtime. The asset also features an intuitive touch-screen HMI and a range of recipe control options including embedded recipes and profiling algorithms. SEMICORE / MRC SEC-643 sputtering model is a reliable and efficient equipment for high-resolution deposition of semiconductors. With its versatile power supply configurations, adjustable chamber pressure control and robust load lock, it offers excellent performance for a range of deposition technologies.
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