Used SHOWA VACUUM SPH-3022 #293649684 for sale

SHOWA VACUUM SPH-3022
ID: 293649684
Vintage: 1992
Sputtering system 1992 vintage.
SHOWA VACUUM SPH-3022 is a sputter deposition system designed for the deposition of thin films onto various materials. It is a dual source sputter deposition system, with a unique design for both source and substrate deposition. The source is an electro-magnetically levitated rotor (E-Rotor) and the substrate is an anodized aluminum chamber. The E-Rotor is designed to deposit either a single material, or a multilayer material onto the substrate. The E-Rotor is designed with two concentric rotors, each spun at a constant speed, producing a vapor-phase substrate deposition reaction. The E-Rotor can be programmed to deposit films with different combinations of material and thickness. The anodized aluminum chamber houses the substrate during the sputtering process. It is designed to provide an optimal substrate-to-source separation and is temperature-controlled, to maintain desired temperature and deposition conditions. The chamber also houses the sample holder, which allows up to two samples per deposition cycle, depending on the length and number of films desired. SPH-3022 sputter deposition system provides the ability to precisely deposit films on varying substrates under a variety of deposition conditions. Its unique design for both source and substrate deposition allows for the deposition of films with varying material and thickness combinations. The anodized aluminum chamber maintains optimal substrate-to-source separation as well as desired temperatures, while the sample holder allows for up to two samples per cycle. SHOWA VACUUM SPH-3022 provides a valuable tool for industrial applications that require highly controlled sputtering.
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