Used TANGO SYSTEMS Axcela #9249009 for sale

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ID: 9249009
Wafer Size: 8"
Sputtering system, 8" (2) Load locks Transfer chamber with robot ICP Chamber PVD chamber for TSV deposition PVD chamber for RDL deposition.
TANGO SYSTEMS Axcela is a sputtering equipment with a number of specialized features and advanced technologies that make it the ideal choice for sputtering a range of materials for industry-leading coatings. It offers superior sputtering uniformity, precise sputtering control, and highly detailed process interfaces that enable superior material coating and accuracy. Axcela consists of a cylindrical chamber that is actively heated and cooled utilizing a standard 230V power outlet, an on-board cooling water source, and a low power control unit. It is also equipped with a self-contained RF sputter source that is continuously adjustable with manual or optional programmable control, allowing for precise and repeatable sputtering. The system is easy to install and use, requiring minimal setup and orientation for operation. Its main features include a 0-25mTorr pressure range control, a 25-250 Watt RF power control, a 6-12 inch substrate, and a 10-position rotating sample holder, making the unit flexible and versatile in various applications. TANGO SYSTEMS Axcela is able to sputter a variety of materials, ranging from metals and alloys, to ceramic and polymers. It is used to layer and finely control various coatings to create high-performance and multi-functional surfaces on the substrates. Its unique software controls, including adjustable power, enable the user to precisely adjust the deposition rate and quickly reproduce the stable process conditions for precise and consistent results. Furthermore, Axcela is equipped with an open load-lock door to facilitate wafer loading/unloading. It is also designed for high throughput automated processing for optimal machine utilization and electronic monitoring for data acquisition and control. In addition, it includes fail-safe features such as a pre-set process start and stop, as well as an alarm tool to alert the user in case of irregularities. This allows for complete process control to ensure high-quality, consistent, repeatable coatings in a safe and cost-effective manner. Overall, TANGO SYSTEMS Axcela is a reliable and advanced sputtering asset used by many advanced manufacturers and labs across the world. It is robust and user-friendly, enabling users to obtain superior coating results with improved process repeatability. Its flexibility and versatility make it the ideal choice for many coating tasks, providing users with superior quality, cost-effective, versatile coatings.
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