Used TEL / TOKYO ELECTRON / NEXX Apollo Nova HP #9222501 for sale
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ID: 9222501
Wafer Size: 12"
Vintage: 2015
Sputtering system, 12"
Includes:
Automated front end, 12"
(2) Load ports modules with RFID readers
Load lock / Degas / Wafer heat treatment module
ICP Etch module
With CTI Cryo pump, 8" and Constant Pressure Strike (CPS)
Roughing pump
(5) MAGNETRON Deposition chambers:
Power supply: 20 kW
Cryo pump, 8”
Cryo pump, 10”
B1-NS HP MAGNETRON for Ti
(2) B1-NS HP MAGNETRON for Cu
ESC 2 set of (3) trays size kit, 12"
Load Lock Back Side Gas (LLBSG)
Nitrogen gas stick
(2) Boost deposition shields
(2) Etch chamber shields
SECS / GEM
Cable kit, 30 foot option
(2) Spare boost deposition shields
(2) Spare etch chamber shields
(2) B1 MAGNETRON for future Cu / Ti capability
2015 vintage.
TEL / TOKYO ELECTRON / NEXX Apollo Nova HP is an high-performance sputtering equipment designed and manufactured by a Japanese company, TEL. The system consists of a vacuum chamber, an induction coil sputter source, and a power supply. The vacuum chamber is designed and constructed with materials, such as stainless steel, designed to create and maintain a high-vacuum environment for the sputtering process. It is equipped with a variety of vacuum metering and control equipment, such as a vacuum gauge, pressure controller and valve, to ensure accurate and stable maintenance of the vacuum level within the vacuum chamber. The sputtering source is an induction coil sputtering source and consists of both top and bottom induction coil sources. It has an adjustable inductance, current and frequency to allow the sputtering conditions to be optimized for various materials. The induction coil sputtering source allows for the uniform and controlled deposition of thin films to substrates in the vacuum chamber. The power supply for the sputtering unit is designed for both DC and RF power. The RF power supply has adjustable power levels, and both current and voltage are controlled to allow for precise sputtering conditions. The DC power supplies are independently adjustable, and feature current and voltage control to adjust the sputtering conditions. TEL Apollo Nova HP is a versatile and powerful sputtering machine that is well suited to a multitude of applications, such as thin film deposition, IC dielectric layers, TFTs, and solar cell back surface field layers. It is robust and durable, and can be used in industries such as microelectronics, automotive, and solar energy.
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