Used TEL / TOKYO ELECTRON / NEXX Nimbus 314 #9206551 for sale
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ID: 9206551
Wafer Size: 12"
Vintage: 2004
Sputtering system, 12"
Includes:
(3) Magnetrons
RF Substrate bia
ICP Etch
Options
With main system:
(18) Electrostatic chucks for wafer
(6) Trays
Load lock degas
SECS / GEM Interface
Magnetron: G1-HP W/Ti 2007
Nimbus 314HP 300MM robot upgrade to include:
EFEM: 12"
(6) ESC Trays: 12"
(2) Ground plane etch shields: 12"
(2) Cassette adapters
2004 vintage.
TEL / TOKYO ELECTRON / NEXX Nimbus 314 (a sputtering equipment) from TEL (NEXX) is a customizable and highly configurable sputter system designed with the goal of creating superior quality films at a low cost. TEL Nimbus 314 utilizes a three-platen design made up of three independent targets, allowing users to sputter multiple unit cells or metals simultaneously. The sputtered film can also be precisely tuned for properties like electrical resistance, crystallinity, and wetting characteristics, allowing users to create unique and precise films that meet their exact requirements. NEXX Nimbus 314 utilizes a unique magnetically confined plasma source, which generates a higher concentration of ions in the target chamber than other sputtering systems. This results in higher deposition rates and greater uniformity in the sputtered film, reducing the possibility of contamination and making it ideal for high-volume applications. The magnetically confined plasma source also allows Nimbus 314 to handle a wide range of target materials, from noble metals to alloys and semiconductor materials. TOKYO ELECTRON Nimbus 314 is designed to maximize efficiency and flexibility as well. It has an adjustable supply unit that can be configured to provide a variety of voltages and substrates to ensure that the target material is sputtered efficiently and consistently. It also features an angle invariant ion gun that can be used for precise angle adjustment, as well as an adjustable incident angle for increasing the available sputtering area and centering accuracy. TEL / TOKYO ELECTRON / NEXX Nimbus 314 also has an intuitive and easy to operate user interface, making it an ideal choice for both experienced professionals and new users. It also comes with a set of tools for monitoring film growth, as well as automated processes to adjust various parameters for maximum efficiency and repeatability. Furthermore, the machine has built in safety features designed to protect the user against accidental exposure to sputtered material. In summary, TEL Nimbus 314 from TOKYO ELECTRON (TEL / TOKYO ELECTRON / NEXX) is a highly configurable and efficient sputter tool designed for optimal performance and superior film quality. It offers a high degree of flexibility, allowing users to customize their films to meet their exact requirements. This asset leverages a powerful magnetically confined plasma source to produce ions in higher concentration and more uniform coverage, resulting in more consistent deposition rates and higher quality film growth. Furthermore, it comes with a comprehensive user interface and various automated processes for enhanced efficiency and safety.
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