Used TEL / TOKYO ELECTRON PDU-MKIV #9226264 for sale

TEL / TOKYO ELECTRON PDU-MKIV sputtering equipment is a versatile unit designed for depositing thin films on a variety of substrates. This sputtering system features a Parallel Plate Magnetron (PPM) sputtering technology which utilizes two static magnets to generate an ionized plasma. This plasma is then used to provide a uniform, directional source of material for the deposition process. TEL PDU-MKIV has a massless substrate holder, built-in RF (Radio Frequency) power control, as well as a multi-gas injection unit. This machine can accommodate up to three sputtering sources, with one source being dedicated to a rotary sputtering source. Its advanced technology and robust construction ensures clean, consistent results, with repeatable accuracy. TOKYO ELECTRON PDU-MKIV has four separate process chambers to ensure a clean working environment. The first chamber houses a turntable that can handle up to 300 mm diameter substrates, utilizing a wafer lifting mechanism for the loading and unloading of the substrate. The second chamber houses an anticontamination tool with pressure feedback control that is used to reduce or eliminate contamination from particles or other non-monitored gases. The third chamber houses the sputtering source, where the required material is evaporated in a vacuum chamber. Users can control the rate and energy of the sputtering process to yield the desired film thickness and composition. The final chamber houses the deposition tool, where the aluminum alloy, molybdenum, tungsten, and other metals are heated and melted until they form an even and uniform film on the substrate surface. PDU-MKIV is equipped with advanced diagnostic tools and data analysis software to facilitate quick and sound investigation of the asset specification and sputtering process. The model is also equipped with a variety of user-friendly safety functions, such as a vacuum breach alarm and safety interlock. In conclusion, TEL / TOKYO ELECTRON PDU-MKIV is a versatile sputtering equipment capable of precisely depositing thin films on a variety of substrates with repeatable accuracy. It is equipped with advanced diagnostic tools and data analysis software to make sure users can quickly investigate and troubleshoot the system if they need to.