Used ULVAC Ceraus Z-1000 #9133525 for sale

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ULVAC Ceraus Z-1000
Sold
ID: 9133525
Wafer Size: 5"
System, 5".
ULVAC Ceraus Z-1000 is a sputtering equipment designed to atomically deposit thin-film materials onto substrates. This type of deposition is ideal for producing solid-state components with highly homogenous layers of material. The system is equipped with three NanoJet sputtering sources, capable of depositing materials from a variety of sources to produce homogenous films with high deposition rates and process reliably. The substrate holders can be positioned accurately in x, y, and z directions thanks to the motorized UFS-3C stage for precise alignment and processing. The unit is controlled by the Winpro 7 control software, which features a user-friendly graphical interface to facilitate setup and operation. The temperature can be precisely controlled via the in-line 300 W RF generator. This provides a uniform substrate temperature over the entire substrate holder surface, ensuring the stability of the materials being sputtered in the machine. The Plasma Diagnostic Tool (PDS), equipped with an on-line hydrocarbon detector and hydrogen cryopump, enables accurate control of chamber pressure, gas flow and composition, which helps to maintain consistent film properties and performance. Ceraus Z-1000 is also equipped with a high-resolution, high-precision OptoScan spectrophotometer, which provides the user with a range of features such as real-time monitoring of thin-film deposition, inline spectroscopic reflectivity and normal incidence optical constants measure. Overall, ULVAC Ceraus Z-1000 is a powerful and versatile asset capable of producing advanced thin-film components with superior quality and reliability. With its intuitive graphical user-interface, precision spherically-corrected substrate holders, and integrated plasma diagnostic model, it offers consistent operation in a reliable and easy to use platform.
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