Used ULVAC Ceraus Z-1301 #9053700 for sale

ULVAC Ceraus Z-1301
ID: 9053700
Vintage: 2002
Sputtering system, 2002 vintage.
ULVAC Ceraus Z-1301 is a next-generation sputtering equipment designed for ultra-high-precision deposition of thin films. It features a sophisticated sputtering process incorporating three independent RF/DC/DC sputtering sources, allowing for precise control of the deposition rate and uniformity over a wide area. The three sputtering sources are powered by a powerful Pulsed DC (PDC) source, allowing for precise control over sputtering power and current. The versatile Ceraus Z-1301 is capable of depositing dielectric films, metals, and compound materials over a wide range of pressures, temperatures, and sputtering powers. ULVAC Ceraus Z-1301 includes a variety of advanced features, such as a large format sample holder and load lock system, for precise sample mounting and repetitive operations. The unit also includes a motorized sputtering distance component, which ensures substrate-target distance is optimized for maximum deposition efficiency. Ceraus Z-1301 incorporates a real-time data acquisition and monitoring machine, providing live information on deposition rate, uniformity, substrate deflection, and etc. ULVAC Ceraus Z-1301 provides user-friendly operation, from recipe setup through film monitoring. It is capable of performing standard sputter deposition processes, as well as specialized processes, such as reactive and high-power deposition. Ceraus Z-1301 is the preferred tool for a variety of thin-film deposition tasks, from metal-insulator-metal (MIM) deposition, to passivation layer creation, to precision optical components coating. In addition, its built-in safety features, advanced process control, and exceptional reliability ensure that ULVAC Ceraus Z-1301 stands out as an ideal choice for sputter deposition. It is capable of producing high-quality films with uniform deposition over large areas, meeting the most stringent deposition requirements. Equipped with ULVAC Pulsed DC source, Ceraus Z-1301 provides a robust and reliable platform for thin-film deposition applications in a wide range of industries, from electrical and optical components, to biomedical sensors.
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