Used ULVAC Ceraus ZX-1000 #9078343 for sale

ULVAC Ceraus ZX-1000 Sputtering Equipment is used for applications such as physical vapour deposition, explosive evaporation, and plasma-enhanced chemical vapour deposition. Its large-area, three-target design allows for high-speed sputtering to enable superior film uniformity and allows for deposition over large substrate sizes. It is a fully automated process that is adaptive to challenging thick sequences. ULVAC CERAUS ZX 1000 Sputtering System includes an ultra-high-vacuum chamber capable of reaching pressures as low as 1x10-6 Pa. This high level of vacuum is necessary to ensure high-quality deposition. The chamber is equipped with a low-emission, linear-induction magnetron and a triple target. The linear-induction magnetron allows for deposition at lower temperatures than with other equipment while also being able to maintain uniform deposition over large areas. The triple target configuration allows for different deposition rates across each of the three targets, providing superior uniformity. The ZX-1000 offers excellent deposition uniformity, even with challenging materials and structures. The unit can also process flexible substrates as small as 100mm x 150mm in size, as well as larger substrates up to 1000mm². A unique feature of the ZX-1000 is its highly configurable gas delivery machine that allows for different deposition processes, such as plasma-enhanced chemical vapour deposition and reactive sputtering. The tool also allows for a wide range of process parameters, such as the control of target bias, substrate temperature, cathode voltage, substrate bias, and off-gassing. Ceraus ZX-1000 Sputtering Asset offers superior quality and uniformity and is capable of performing complex deposition processes, making it ideal for applications that require precision deposition of thin films and structures. Its advanced features make it a powerful tool for high-volume production of thin-film optical coatings, thin-film solar cells, laser diodes, sensors, and other devices.