Used ULVAC Ceraus ZX-1000 #9274937 for sale
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ID: 9274937
Wafer Size: 8"
Vintage: 2011
Sputtering system, 8"
Turbo pump: TMP 202LM
Reflow
Degas
Ti / TiN LTS
Ti
AI
Cryo pump: CRYO-T8PN
(4) RS5 Refrigerators
2011 vintage.
ULVAC Ceraus ZX-1000 is a sputtering equipment developed by ULVAC, an advanced technology manufacturer of thin-film deposition and sputtering systems. It is designed for independent control of sputter power, pulse frequency, angular velocity, target area/pressure and air flow, allowing for high-precision film formation and improved productivity. Using ULVAC CERAUS ZX 1000, users can simultaneously form films of up to four materials on a single substrate. This is accomplished by the patented dual-target technology, which employs a rotating target. This technology enables higher-rate deposition by increasing sputter particles at the incident angles. The dual-target technology also allows particles to be efficiently injected on each sputtering material, making it compatible with a variety of substrates and materials. Ceraus ZX-1000 utilizes a flat circular sputtering system, increasing efficiency by allowing multiple targets to be installed. This unit allows optimization of the film forming conditions and for rapid process changes. It is also compatible with multiple types of inlets including Ar, O2, N2 and rare gases, as well as multiple sources including direct current (DC), low frequency (LF) and radio frequency (RF) discharge. CERAUS ZX 1000 is composed of a vacuum chamber, which is sealed by a gate valve and incorporates an airstream type of cooling machine that prevents heat from leaking into the chamber. Inside the chamber is the sputtering tool including the target, platter, ground plate, and power unit. The sputtering process utilizes a magnetic field to optimize the surface of the material being sputtered. This ensures a more uniform film deposition. Target materials can be chosen to match specific application requirements and can range from carbon, aluminum, copper, and stainless steel. ULVAC Ceraus ZX-1000 is completely automated and includes sophisticated safety features for maximum efficiency and protection. This asset is easy to operate and includes multiple feature sets, making it an ideal solution for industrial and research applications.
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