Used ULVAC Ceraus ZX-1000 #9274945 for sale
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ID: 9274945
Wafer Size: 8"
Vintage: 1996
Sputtering systems, 8"
Turbo pump: TMP 202LM
Reflow
Degas
Ti/TiN LTS
Ti
Al
Cryo pump: Cryo-T8PN
With (4) RS5 Refrigerators
1996 vintage.
ULVAC Ceraus ZX-1000 is a sputtering equipment designed to enable a wide range of applications for thin-film deposition technology. It utilizes high-frequency radio frequency (RF) reactive sputtering to produce films that have uniform thickness, high density, low stress, and excellent electrical and optical properties. Using this technology, thin films can be applied to metal, glass or ceramic substrates of any shape or size, providing the ability to tailor the film properties and ultimately create complex structures. ULVAC CERAUS ZX 1000 features a modular design which allows it to be configured to meet the specific requirements of a given application. It has two chambers; a process chamber and pre-process chamber. In the process chamber, RF sputtering is used to deposit thin films on a substrate within a controlled environment. This chamber features a pedestal frequency sputtering system that enables high deposition rates and precise control of the process parameters. In the pre-process chamber, a variety of film preparation techniques can be implemented such as degassing, glow discharge, and light O2 etching. The unit is equipped with an advanced software package designed to allow efficient and precise control over the entire deposition process. It has several advanced features including vacuum clean cycles, auto-restore protection, stopping at preset conditions, and data logging. The machine is also designed to be user friendly, with intuitive and customizable operations. The RF sputtering process can be used to deposit a wide range of thin film materials such as metal, oxide, nitride, and alloy films. These films can be deposited at thicknesses ranging from a few nanometers (nm) to several millimeters and can be used in applications such as semiconductors, flat-panel displays, optical components, and medical devices. Ceraus ZX-1000 also has the capability of applying anti-reflection coatings, protective coatings, and decorative oxide films. Through its highly advanced features and capabilities, CERAUS ZX 1000 is a highly versatile and effective sputtering tool. Its modular design and sophisticated software make it easy to customize for any specific application environment and its robust construction ensures quality film deposition and reliable operation for years to come.
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