Used ULVAC Ceraus ZX-1000 #9274947 for sale

ID: 9274947
Wafer Size: 8"
Vintage: 1995
Sputtering system, 8" Turbo pump: TMP 202LM Reflow Degas Ti/TiN (2) AI Cryo pump: Cryo-T8S With (2) RS10 Refrigerators Cryo pump: Cryo-T8PN With (2) RS5 Refrigerators 1995 vintage.
ULVAC Ceraus ZX-1000 is a sputtering equipment designed for high-quality physical vapor deposition (PVD) processes. It is capable of depositing various thin coatings onto substrates of any shape, size, or material. It is particularly well-suited for a wide range of storage disk coatings, such as hard disk storage, semiconductors, LCDs, and solar cells. ULVAC CERAUS ZX 1000 features two magnetron sputtering cathodes and one electron beam gun for sputtering deposition. Its dual-cathode sputtering capabilities allow for high deposition rates, up to 400 nm/min, and can achieve an SRP <1%. The electron beam gun can provide greater precision with its highly directional particle stream which allows for higher rates of sintering and improved adhesion of the coating. In addition, the system is equipped with an oxygen-controlled chamber which can be used for oxidation treatments and an ultrasonic rear surface cleaning to prepare the substrate for deposition. To ensure the unit's performance and accuracy, it has built-in inspection and testing tools to verify the quality of the coating. This includes end-point detection, thickness measurements, and other routine tests to observe the process conditions and finished product. To make operation of the machine easier, Ceraus ZX-1000 has a tool controller, allowing it to be operated from anywhere with web-based access. CERAUS ZX 1000 sputtering asset offers many advantages to users. It is suitable for a wide variety of coating applications, including optical components, magnetic or magneto-optic recording media, and thin-film solar cells. It can achieve high deposition rates while offering precision and accuracy in its results. The model also has built-in testing and inspection tools and can be operated remotely, making it convenient and efficient. With its various features, ULVAC Ceraus ZX-1000 sputtering equipment is an advantageous system that offers an array of options for users.
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