Used ULVAC CS-200 #9328776 for sale

Manufacturer
ULVAC
Model
CS-200
ID: 9328776
Vintage: 2007
Sputtering system P/N: RS13-30170A Carrier: 220φ Tray Cathode: T/S Variable, 12" SiC Heater Maximum temperature: 300°C RF Power supply: 3 kW 2007 vintage.
ULVAC CS-200 is a high-quality sputtering equipment designed for either stand-alone or in-line operations. It is one of the premier systems on the market, developed by ULVAC, an industry-recognized leader in thin film processing applications. CS-200 utilizes both magnetron and diode sputtering methane, argon and auxiliary gases, allowing for magnetic field-enhanced sputtering. It utilizes a unique patented dual-frequency generator allowing both high and low frequency sputtering. The result of this technology is that it produces very clean and uniform films, and can also achieve higher deposition rates compared to other systems. ULVAC CS-200 is designed to be used in high-volume production environments, and its features are well-suited for this purpose. It has a dual-frequency 13.56MHz generator, allowing precise control over the rate and voltage of the sputtering process. This generator also allows for the acceptance of higher sputtering powers, thus resulting in higher deposition rates. It also features an auto-blanket transfer system, allowing the user to quickly and easily prepare their substrate for sputter deposition. CS-200 also boasts a broad range of hardware options, such as end-effector wands, buckets, and rotary substrates for rotary sputtering. This unit also has a wide range of software options to choose from such as recipe-based sputtering/sputtering, sputter parameter adjustment, and multiple substrate/target sputtering. Additionally, the machine comes with a built-in programmable logic controller (PLC), allowing for easy and efficient automation of sputtering processes. ULVAC CS-200 also provides the user with a number of safety features including a vacuum tool leak sensor, a ground fault protector, and a complete CE compliant asset. It also provides a wide array of user options, allowing for easy and fast customization of the model to meet different sputtering needs. Overall, CS-200 is a top-of-the-line sputtering equipment with a host of features that make it suitable for both high-volume production, and small-scale professional sputtering. It comes with a range of safety features, allowing the user to feel confident when using the system. It also provides a range of hardware and software options to ensure the user can tailor the unit to whatever needs they may have.
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