Used ULVAC EI-5 #293648862 for sale

ULVAC EI-5 sputtering equipment is a high performance deposition system designed for producing thin film and metal oxide layers. It is suitable for a wide range of applications including precision thin-film deposition, protective coatings, adhesion layers, metal oxide coatings and thin-film layering of semiconductor materials. The core of EI-5 utilizes compact ULVAC Electron-beam Direct-current sputtering technology, utilizing a planar magnetron coupled with a concentrative electron-beam to generate highly homogeneous thin films. Its 4-axis manipulator provides precise control and direction of the electron beam resulting in uniform and repeatable thin-film deposition over large areas. The unit is also equipped with a Chamber Roll-Tilting Feature(CRT) to eliminate process non-uniformities due to inverted substrates. ULVAC EI-5 is capable of producing thin films with a wide range of thicknesses and rates with utmost precision. It has a high process repeatability and can be operated in a vertical or horizontal configuration. On board raster scanning is available with a scan speed of up to 5 mm/sec. The machine also features automatic de-ionization and cleaning, which prevents contamination and allows for quick and efficient substrate changes during operation. EI-5 sputtering tool is compatible with many ULVAC accessories, such as the vacuum plasma cleaner, sources, targets and masks. It is also equipped with an integrated asset controller, which allows for easy and accurate process management, as well as a digital visual interface for easy adjustment of parameters, recipes and history records. Overall, ULVAC EI-5 offers a highly efficient and advanced sputtering model that is well suited for producing high quality layers and structures, with precision and repeatability. Its compact size and flexibility makes it an ideal solution for a wide range of thin film deposition applications.