Used ULVAC Ei-5K #293592010 for sale

ULVAC Ei-5K
Manufacturer
ULVAC
Model
Ei-5K
ID: 293592010
Wafer Size: 6"
E-Beam evaporators, 6".
ULVAC Ei-5K is a high-performance sputtering equipment designed for laboratory and industrial applications. It is a fully automated deposition system which allows for reliable, repeatable deposition of materials onto substrates. ULVAC EI 5 K offers an advanced sputtering tool solution with multiple process capabilities, including ULVAC Plasmaless sputtering method, which allows for high deposition rates, high-quality films, and excellent film-to-film repeatability. Ei-5K includes a standard configuration of five sputtering cathodes, allowing for the deposition of five different target materials. Each cathode can be individually adjusted for different ion densities and gas flow rates, giving users a wide variety of options. Additionally, EI 5 K can also accommodate headers to enable simultaneous deposition of multiple target materials or remote plasma-enhanced deposition of materials. ULVAC Ei-5K also includes ULVAC advanced multi-stage end-point detection unit, which is capable of controlling the entire deposition process. This machine allows users to monitor the thickness of the material being deposited and to precisely determine when a process is complete. It also ensures that the correct amount of material is deposited, resulting in repeatable results over multiple runs. In addition, ULVAC EI 5 K allows users to adjust deposition parameters such as target angle, power density, and materials being sputtered, enabling them to fine-tune process parameters and optimize films for their application. Furthermore, the powerful, dedicated software also allows users to save and store data, enabling them to quickly and easily recall previous settings or monitor the deposition process. Overall, Ei-5K is an advanced sputtering tool providing a wide range of features for reliable, repeatable, and high-quality films. With its multiple process capabilities and sophisticated end-point detection asset, and its intuitive user interface, EI 5 K allows users to easily operate the machine and achieve optimal results.
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